12/13/2012	9:53:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2012	9:53:07 AM	Recipe started at 9:53 AM
12/13/2012	9:53:07 AM	Helium valve closed
12/13/2012	9:53:07 AM	H2 valve closed
12/13/2012	9:53:07 AM	BCl3 valve closed
12/13/2012	9:53:07 AM	PH3 valve closed
12/13/2012	9:53:07 AM	SiCl4 pre valve closed
12/13/2012	9:53:07 AM	SiCl4 post valve closed
12/13/2012	9:53:07 AM	Main Vac valve closed
12/13/2012	9:53:07 AM	Bypass valve closed
12/13/2012	9:53:07 AM	Bubbler valve closed
12/13/2012	9:53:07 AM	Helium MFC set to  0.000000
12/13/2012	9:53:07 AM	H2 MFC set to  0.000000
12/13/2012	9:53:07 AM	BCl3 MFC set to  0.000000
12/13/2012	9:53:07 AM	PH3 MFC set to  0.000000
12/13/2012	9:53:07 AM	SiCl4 MFC set to  0.000000
12/13/2012	9:53:07 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:53:07 AM	Tube furnace set to 0
12/13/2012	9:53:10 AM	H2 valve closed
12/13/2012	9:53:10 AM	BCl3 valve closed
12/13/2012	9:53:10 AM	PH3 valve closed
12/13/2012	9:53:10 AM	SiCl4 pre valve closed
12/13/2012	9:53:10 AM	SiCl4 post valve closed
12/13/2012	9:53:10 AM	Main Vac valve closed
12/13/2012	9:53:10 AM	Bypass valve closed
12/13/2012	9:53:10 AM	Bubbler valve closed
12/13/2012	9:53:10 AM	Helium valve opened
12/13/2012	9:53:10 AM	Helium MFC set to  500.000000
12/13/2012	9:53:10 AM	H2 MFC set to  0.000000
12/13/2012	9:53:10 AM	BCl3 MFC set to  0.000000
12/13/2012	9:53:10 AM	PH3 MFC set to  0.000000
12/13/2012	9:53:10 AM	SiCl4 MFC set to  0.000000
12/13/2012	9:53:10 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:53:10 AM	Tube furnace set to 0
12/13/2012	9:54:23 AM	Helium valve closed
12/13/2012	9:54:23 AM	H2 valve closed
12/13/2012	9:54:23 AM	BCl3 valve closed
12/13/2012	9:54:23 AM	PH3 valve closed
12/13/2012	9:54:23 AM	SiCl4 pre valve closed
12/13/2012	9:54:23 AM	SiCl4 post valve closed
12/13/2012	9:54:23 AM	Main Vac valve closed
12/13/2012	9:54:23 AM	Bypass valve closed
12/13/2012	9:54:23 AM	Bubbler valve closed
12/13/2012	9:54:23 AM	Helium MFC set to  0.000000
12/13/2012	9:54:23 AM	H2 MFC set to  0.000000
12/13/2012	9:54:23 AM	BCl3 MFC set to  0.000000
12/13/2012	9:54:23 AM	PH3 MFC set to  0.000000
12/13/2012	9:54:23 AM	SiCl4 MFC set to  0.000000
12/13/2012	9:54:23 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:54:23 AM	Tube furnace set to 0
12/13/2012	9:54:24 AM	Run finished at 9:54 AM
12/13/2012	9:54:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2012	9:58:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2012	9:58:10 AM	Recipe started at 9:58 AM
12/13/2012	9:58:10 AM	Helium valve closed
12/13/2012	9:58:10 AM	H2 valve closed
12/13/2012	9:58:10 AM	BCl3 valve closed
12/13/2012	9:58:10 AM	PH3 valve closed
12/13/2012	9:58:10 AM	SiCl4 pre valve closed
12/13/2012	9:58:10 AM	SiCl4 post valve closed
12/13/2012	9:58:10 AM	Main Vac valve closed
12/13/2012	9:58:10 AM	Bubbler valve closed
12/13/2012	9:58:10 AM	Bypass valve opened
12/13/2012	9:58:10 AM	Helium MFC set to  0.000000
12/13/2012	9:58:10 AM	H2 MFC set to  0.000000
12/13/2012	9:58:10 AM	BCl3 MFC set to  0.000000
12/13/2012	9:58:10 AM	PH3 MFC set to  0.000000
12/13/2012	9:58:10 AM	SiCl4 MFC set to  0.000000
12/13/2012	9:58:10 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:58:11 AM	Tube furnace set to 0
12/13/2012	9:59:41 AM	Helium valve closed
12/13/2012	9:59:41 AM	H2 valve closed
12/13/2012	9:59:41 AM	BCl3 valve closed
12/13/2012	9:59:41 AM	PH3 valve closed
12/13/2012	9:59:41 AM	SiCl4 pre valve closed
12/13/2012	9:59:41 AM	SiCl4 post valve closed
12/13/2012	9:59:41 AM	Main Vac valve closed
12/13/2012	9:59:41 AM	Bubbler valve closed
12/13/2012	9:59:41 AM	Bypass valve opened
12/13/2012	9:59:41 AM	Helium MFC set to  0.000000
12/13/2012	9:59:41 AM	H2 MFC set to  0.000000
12/13/2012	9:59:41 AM	BCl3 MFC set to  0.000000
12/13/2012	9:59:41 AM	PH3 MFC set to  0.000000
12/13/2012	9:59:41 AM	SiCl4 MFC set to  0.000000
12/13/2012	9:59:41 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:59:41 AM	Tube furnace set to 0
12/13/2012	10:00:41 AM	Helium valve closed
12/13/2012	10:00:41 AM	H2 valve closed
12/13/2012	10:00:41 AM	BCl3 valve closed
12/13/2012	10:00:41 AM	PH3 valve closed
12/13/2012	10:00:41 AM	SiCl4 pre valve closed
12/13/2012	10:00:41 AM	SiCl4 post valve closed
12/13/2012	10:00:41 AM	Bypass valve closed
12/13/2012	10:00:41 AM	Bubbler valve closed
12/13/2012	10:00:41 AM	Main Vac valve opened
12/13/2012	10:00:41 AM	Helium MFC set to  0.000000
12/13/2012	10:00:41 AM	H2 MFC set to  0.000000
12/13/2012	10:00:41 AM	BCl3 MFC set to  0.000000
12/13/2012	10:00:41 AM	PH3 MFC set to  0.000000
12/13/2012	10:00:41 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:00:41 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:00:41 AM	Tube furnace set to 0
12/13/2012	10:00:42 AM	Run finished at 10:00 AM
12/13/2012	10:00:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2012	10:00:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	10:01:01 AM	Recipe started at 10:00 AM
12/13/2012	10:01:01 AM	Helium valve closed
12/13/2012	10:01:01 AM	H2 valve closed
12/13/2012	10:01:01 AM	BCl3 valve closed
12/13/2012	10:01:01 AM	PH3 valve closed
12/13/2012	10:01:01 AM	SiCl4 pre valve closed
12/13/2012	10:01:01 AM	SiCl4 post valve closed
12/13/2012	10:01:01 AM	Main Vac valve closed
12/13/2012	10:01:01 AM	Bubbler valve closed
12/13/2012	10:01:01 AM	Bypass valve opened
12/13/2012	10:01:01 AM	Helium MFC set to  0.000000
12/13/2012	10:01:01 AM	H2 MFC set to  0.000000
12/13/2012	10:01:01 AM	BCl3 MFC set to  0.000000
12/13/2012	10:01:02 AM	PH3 MFC set to  0.000000
12/13/2012	10:01:02 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:01:02 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:01:02 AM	Tube furnace set to 0
12/13/2012	10:01:02 AM	Helium valve closed
12/13/2012	10:01:02 AM	H2 valve closed
12/13/2012	10:01:02 AM	BCl3 valve closed
12/13/2012	10:01:02 AM	PH3 valve closed
12/13/2012	10:01:02 AM	SiCl4 pre valve closed
12/13/2012	10:01:02 AM	SiCl4 post valve closed
12/13/2012	10:01:02 AM	Main Vac valve closed
12/13/2012	10:01:02 AM	Bubbler valve closed
12/13/2012	10:01:02 AM	Bypass valve opened
12/13/2012	10:01:02 AM	Helium MFC set to  0.000000
12/13/2012	10:01:02 AM	H2 MFC set to  0.000000
12/13/2012	10:01:02 AM	BCl3 MFC set to  0.000000
12/13/2012	10:01:02 AM	PH3 MFC set to  0.000000
12/13/2012	10:01:02 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:01:02 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:01:02 AM	Tube furnace set to 0
12/13/2012	10:01:32 AM	Helium valve closed
12/13/2012	10:01:32 AM	H2 valve closed
12/13/2012	10:01:32 AM	BCl3 valve closed
12/13/2012	10:01:32 AM	PH3 valve closed
12/13/2012	10:01:32 AM	SiCl4 pre valve closed
12/13/2012	10:01:32 AM	SiCl4 post valve closed
12/13/2012	10:01:32 AM	Bypass valve closed
12/13/2012	10:01:32 AM	Bubbler valve closed
12/13/2012	10:01:32 AM	Main Vac valve opened
12/13/2012	10:01:32 AM	Helium MFC set to  0.000000
12/13/2012	10:01:32 AM	H2 MFC set to  0.000000
12/13/2012	10:01:32 AM	BCl3 MFC set to  0.000000
12/13/2012	10:01:32 AM	PH3 MFC set to  0.000000
12/13/2012	10:01:32 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:01:32 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:01:32 AM	Tube furnace set to 0
12/13/2012	10:02:02 AM	H2 valve closed
12/13/2012	10:02:02 AM	BCl3 valve closed
12/13/2012	10:02:02 AM	PH3 valve closed
12/13/2012	10:02:02 AM	SiCl4 pre valve closed
12/13/2012	10:02:02 AM	SiCl4 post valve closed
12/13/2012	10:02:02 AM	Bypass valve closed
12/13/2012	10:02:02 AM	Bubbler valve closed
12/13/2012	10:02:02 AM	Helium valve opened
12/13/2012	10:02:02 AM	Main Vac valve opened
12/13/2012	10:02:02 AM	Helium MFC set to  20.000000
12/13/2012	10:02:02 AM	H2 MFC set to  0.000000
12/13/2012	10:02:02 AM	BCl3 MFC set to  0.000000
12/13/2012	10:02:02 AM	PH3 MFC set to  0.000000
12/13/2012	10:02:02 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:02:02 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:02:03 AM	Tube furnace set to 0
12/13/2012	10:02:33 AM	Helium valve closed
12/13/2012	10:02:33 AM	H2 valve closed
12/13/2012	10:02:33 AM	BCl3 valve closed
12/13/2012	10:02:33 AM	PH3 valve closed
12/13/2012	10:02:33 AM	SiCl4 pre valve closed
12/13/2012	10:02:33 AM	SiCl4 post valve closed
12/13/2012	10:02:33 AM	Bypass valve closed
12/13/2012	10:02:33 AM	Bubbler valve closed
12/13/2012	10:02:33 AM	Main Vac valve opened
12/13/2012	10:02:33 AM	Helium MFC set to  0.000000
12/13/2012	10:02:33 AM	H2 MFC set to  0.000000
12/13/2012	10:02:33 AM	BCl3 MFC set to  0.000000
12/13/2012	10:02:33 AM	PH3 MFC set to  0.000000
12/13/2012	10:02:33 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:02:33 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:02:33 AM	Tube furnace set to 0
12/13/2012	10:03:03 AM	H2 valve closed
12/13/2012	10:03:03 AM	BCl3 valve closed
12/13/2012	10:03:03 AM	PH3 valve closed
12/13/2012	10:03:03 AM	SiCl4 pre valve closed
12/13/2012	10:03:03 AM	SiCl4 post valve closed
12/13/2012	10:03:03 AM	Bypass valve closed
12/13/2012	10:03:03 AM	Bubbler valve closed
12/13/2012	10:03:03 AM	Helium valve opened
12/13/2012	10:03:03 AM	Main Vac valve opened
12/13/2012	10:03:03 AM	Helium MFC set to  20.000000
12/13/2012	10:03:03 AM	H2 MFC set to  0.000000
12/13/2012	10:03:03 AM	BCl3 MFC set to  0.000000
12/13/2012	10:03:03 AM	PH3 MFC set to  0.000000
12/13/2012	10:03:03 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:03:03 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:03:03 AM	Tube furnace set to 0
12/13/2012	10:03:33 AM	Helium valve closed
12/13/2012	10:03:33 AM	H2 valve closed
12/13/2012	10:03:33 AM	BCl3 valve closed
12/13/2012	10:03:33 AM	PH3 valve closed
12/13/2012	10:03:33 AM	SiCl4 pre valve closed
12/13/2012	10:03:33 AM	SiCl4 post valve closed
12/13/2012	10:03:33 AM	Bypass valve closed
12/13/2012	10:03:33 AM	Bubbler valve closed
12/13/2012	10:03:33 AM	Main Vac valve opened
12/13/2012	10:03:33 AM	Helium MFC set to  0.000000
12/13/2012	10:03:33 AM	H2 MFC set to  0.000000
12/13/2012	10:03:33 AM	BCl3 MFC set to  0.000000
12/13/2012	10:03:33 AM	PH3 MFC set to  0.000000
12/13/2012	10:03:33 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:03:33 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:03:33 AM	Tube furnace set to 0
12/13/2012	10:04:03 AM	H2 valve closed
12/13/2012	10:04:03 AM	BCl3 valve closed
12/13/2012	10:04:03 AM	PH3 valve closed
12/13/2012	10:04:03 AM	SiCl4 pre valve closed
12/13/2012	10:04:03 AM	SiCl4 post valve closed
12/13/2012	10:04:03 AM	Bypass valve closed
12/13/2012	10:04:03 AM	Bubbler valve closed
12/13/2012	10:04:03 AM	Helium valve opened
12/13/2012	10:04:03 AM	Main Vac valve opened
12/13/2012	10:04:03 AM	Helium MFC set to  20.000000
12/13/2012	10:04:03 AM	H2 MFC set to  0.000000
12/13/2012	10:04:03 AM	BCl3 MFC set to  0.000000
12/13/2012	10:04:03 AM	PH3 MFC set to  0.000000
12/13/2012	10:04:03 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:04:03 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:04:04 AM	Tube furnace set to 0
12/13/2012	10:04:34 AM	Helium valve closed
12/13/2012	10:04:34 AM	H2 valve closed
12/13/2012	10:04:34 AM	BCl3 valve closed
12/13/2012	10:04:34 AM	PH3 valve closed
12/13/2012	10:04:34 AM	SiCl4 pre valve closed
12/13/2012	10:04:34 AM	SiCl4 post valve closed
12/13/2012	10:04:34 AM	Bypass valve closed
12/13/2012	10:04:34 AM	Bubbler valve closed
12/13/2012	10:04:34 AM	Main Vac valve opened
12/13/2012	10:04:34 AM	Helium MFC set to  0.000000
12/13/2012	10:04:34 AM	H2 MFC set to  0.000000
12/13/2012	10:04:34 AM	BCl3 MFC set to  0.000000
12/13/2012	10:04:34 AM	PH3 MFC set to  0.000000
12/13/2012	10:04:34 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:04:34 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:04:34 AM	Tube furnace set to 0
12/13/2012	10:05:04 AM	H2 valve closed
12/13/2012	10:05:04 AM	BCl3 valve closed
12/13/2012	10:05:04 AM	PH3 valve closed
12/13/2012	10:05:04 AM	SiCl4 pre valve closed
12/13/2012	10:05:04 AM	SiCl4 post valve closed
12/13/2012	10:05:04 AM	Bypass valve closed
12/13/2012	10:05:04 AM	Bubbler valve closed
12/13/2012	10:05:04 AM	Helium valve opened
12/13/2012	10:05:04 AM	Main Vac valve opened
12/13/2012	10:05:04 AM	Helium MFC set to  20.000000
12/13/2012	10:05:04 AM	H2 MFC set to  0.000000
12/13/2012	10:05:04 AM	BCl3 MFC set to  0.000000
12/13/2012	10:05:04 AM	PH3 MFC set to  0.000000
12/13/2012	10:05:04 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:05:04 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:05:04 AM	Tube furnace set to 0
12/13/2012	10:05:34 AM	Helium valve closed
12/13/2012	10:05:34 AM	H2 valve closed
12/13/2012	10:05:34 AM	BCl3 valve closed
12/13/2012	10:05:34 AM	PH3 valve closed
12/13/2012	10:05:34 AM	SiCl4 pre valve closed
12/13/2012	10:05:34 AM	SiCl4 post valve closed
12/13/2012	10:05:34 AM	Bypass valve closed
12/13/2012	10:05:34 AM	Bubbler valve closed
12/13/2012	10:05:34 AM	Main Vac valve opened
12/13/2012	10:05:34 AM	Helium MFC set to  0.000000
12/13/2012	10:05:34 AM	H2 MFC set to  0.000000
12/13/2012	10:05:34 AM	BCl3 MFC set to  0.000000
12/13/2012	10:05:34 AM	PH3 MFC set to  0.000000
12/13/2012	10:05:34 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:05:34 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:05:34 AM	Tube furnace set to 0
12/13/2012	10:06:04 AM	H2 valve closed
12/13/2012	10:06:04 AM	BCl3 valve closed
12/13/2012	10:06:04 AM	PH3 valve closed
12/13/2012	10:06:04 AM	SiCl4 pre valve closed
12/13/2012	10:06:04 AM	SiCl4 post valve closed
12/13/2012	10:06:04 AM	Bypass valve closed
12/13/2012	10:06:04 AM	Bubbler valve closed
12/13/2012	10:06:04 AM	Helium valve opened
12/13/2012	10:06:04 AM	Main Vac valve opened
12/13/2012	10:06:04 AM	Helium MFC set to  20.000000
12/13/2012	10:06:04 AM	H2 MFC set to  0.000000
12/13/2012	10:06:04 AM	BCl3 MFC set to  0.000000
12/13/2012	10:06:04 AM	PH3 MFC set to  0.000000
12/13/2012	10:06:04 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:06:04 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:06:05 AM	Tube furnace set to 0
12/13/2012	10:06:35 AM	Helium valve closed
12/13/2012	10:06:35 AM	H2 valve closed
12/13/2012	10:06:35 AM	BCl3 valve closed
12/13/2012	10:06:35 AM	PH3 valve closed
12/13/2012	10:06:35 AM	SiCl4 pre valve closed
12/13/2012	10:06:35 AM	SiCl4 post valve closed
12/13/2012	10:06:35 AM	Bypass valve closed
12/13/2012	10:06:35 AM	Bubbler valve closed
12/13/2012	10:06:35 AM	Main Vac valve opened
12/13/2012	10:06:35 AM	Helium MFC set to  0.000000
12/13/2012	10:06:35 AM	H2 MFC set to  0.000000
12/13/2012	10:06:35 AM	BCl3 MFC set to  0.000000
12/13/2012	10:06:35 AM	PH3 MFC set to  0.000000
12/13/2012	10:06:35 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:06:35 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:06:35 AM	Tube furnace set to 0
12/13/2012	10:07:05 AM	H2 valve closed
12/13/2012	10:07:05 AM	BCl3 valve closed
12/13/2012	10:07:05 AM	PH3 valve closed
12/13/2012	10:07:05 AM	SiCl4 pre valve closed
12/13/2012	10:07:05 AM	SiCl4 post valve closed
12/13/2012	10:07:05 AM	Bypass valve closed
12/13/2012	10:07:05 AM	Bubbler valve closed
12/13/2012	10:07:05 AM	Helium valve opened
12/13/2012	10:07:05 AM	Main Vac valve opened
12/13/2012	10:07:05 AM	Helium MFC set to  20.000000
12/13/2012	10:07:05 AM	H2 MFC set to  0.000000
12/13/2012	10:07:05 AM	BCl3 MFC set to  0.000000
12/13/2012	10:07:05 AM	PH3 MFC set to  0.000000
12/13/2012	10:07:05 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:07:05 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:07:05 AM	Tube furnace set to 0
12/13/2012	10:07:35 AM	Helium valve closed
12/13/2012	10:07:35 AM	H2 valve closed
12/13/2012	10:07:35 AM	BCl3 valve closed
12/13/2012	10:07:35 AM	PH3 valve closed
12/13/2012	10:07:35 AM	SiCl4 pre valve closed
12/13/2012	10:07:35 AM	SiCl4 post valve closed
12/13/2012	10:07:35 AM	Bypass valve closed
12/13/2012	10:07:35 AM	Bubbler valve closed
12/13/2012	10:07:35 AM	Main Vac valve opened
12/13/2012	10:07:35 AM	Helium MFC set to  0.000000
12/13/2012	10:07:35 AM	H2 MFC set to  0.000000
12/13/2012	10:07:35 AM	BCl3 MFC set to  0.000000
12/13/2012	10:07:35 AM	PH3 MFC set to  0.000000
12/13/2012	10:07:35 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:07:35 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:07:35 AM	Tube furnace set to 0
12/13/2012	10:08:05 AM	H2 valve closed
12/13/2012	10:08:05 AM	BCl3 valve closed
12/13/2012	10:08:05 AM	PH3 valve closed
12/13/2012	10:08:05 AM	SiCl4 pre valve closed
12/13/2012	10:08:05 AM	SiCl4 post valve closed
12/13/2012	10:08:05 AM	Bypass valve closed
12/13/2012	10:08:05 AM	Bubbler valve closed
12/13/2012	10:08:05 AM	Helium valve opened
12/13/2012	10:08:05 AM	Main Vac valve opened
12/13/2012	10:08:05 AM	Helium MFC set to  20.000000
12/13/2012	10:08:05 AM	H2 MFC set to  0.000000
12/13/2012	10:08:05 AM	BCl3 MFC set to  0.000000
12/13/2012	10:08:05 AM	PH3 MFC set to  0.000000
12/13/2012	10:08:05 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:08:05 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:08:06 AM	Tube furnace set to 0
12/13/2012	10:08:36 AM	Helium valve closed
12/13/2012	10:08:36 AM	H2 valve closed
12/13/2012	10:08:36 AM	BCl3 valve closed
12/13/2012	10:08:36 AM	PH3 valve closed
12/13/2012	10:08:36 AM	SiCl4 pre valve closed
12/13/2012	10:08:36 AM	SiCl4 post valve closed
12/13/2012	10:08:36 AM	Bypass valve closed
12/13/2012	10:08:36 AM	Bubbler valve closed
12/13/2012	10:08:36 AM	Main Vac valve opened
12/13/2012	10:08:36 AM	Helium MFC set to  0.000000
12/13/2012	10:08:36 AM	H2 MFC set to  0.000000
12/13/2012	10:08:36 AM	BCl3 MFC set to  0.000000
12/13/2012	10:08:36 AM	PH3 MFC set to  0.000000
12/13/2012	10:08:36 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:08:36 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:08:36 AM	Tube furnace set to 0
12/13/2012	10:09:06 AM	H2 valve closed
12/13/2012	10:09:06 AM	BCl3 valve closed
12/13/2012	10:09:06 AM	PH3 valve closed
12/13/2012	10:09:06 AM	SiCl4 pre valve closed
12/13/2012	10:09:06 AM	SiCl4 post valve closed
12/13/2012	10:09:06 AM	Bypass valve closed
12/13/2012	10:09:06 AM	Bubbler valve closed
12/13/2012	10:09:06 AM	Helium valve opened
12/13/2012	10:09:06 AM	Main Vac valve opened
12/13/2012	10:09:06 AM	Helium MFC set to  20.000000
12/13/2012	10:09:06 AM	H2 MFC set to  0.000000
12/13/2012	10:09:06 AM	BCl3 MFC set to  0.000000
12/13/2012	10:09:06 AM	PH3 MFC set to  0.000000
12/13/2012	10:09:06 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:09:06 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:09:06 AM	Tube furnace set to 0
12/13/2012	10:09:36 AM	Helium valve closed
12/13/2012	10:09:36 AM	H2 valve closed
12/13/2012	10:09:36 AM	BCl3 valve closed
12/13/2012	10:09:36 AM	PH3 valve closed
12/13/2012	10:09:36 AM	SiCl4 pre valve closed
12/13/2012	10:09:36 AM	SiCl4 post valve closed
12/13/2012	10:09:36 AM	Bypass valve closed
12/13/2012	10:09:36 AM	Bubbler valve closed
12/13/2012	10:09:36 AM	Main Vac valve opened
12/13/2012	10:09:36 AM	Helium MFC set to  0.000000
12/13/2012	10:09:36 AM	H2 MFC set to  0.000000
12/13/2012	10:09:36 AM	BCl3 MFC set to  0.000000
12/13/2012	10:09:36 AM	PH3 MFC set to  0.000000
12/13/2012	10:09:36 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:09:36 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:09:36 AM	Tube furnace set to 0
12/13/2012	10:10:06 AM	H2 valve closed
12/13/2012	10:10:06 AM	BCl3 valve closed
12/13/2012	10:10:06 AM	PH3 valve closed
12/13/2012	10:10:06 AM	SiCl4 pre valve closed
12/13/2012	10:10:06 AM	SiCl4 post valve closed
12/13/2012	10:10:06 AM	Bypass valve closed
12/13/2012	10:10:06 AM	Bubbler valve closed
12/13/2012	10:10:06 AM	Helium valve opened
12/13/2012	10:10:06 AM	Main Vac valve opened
12/13/2012	10:10:06 AM	Helium MFC set to  20.000000
12/13/2012	10:10:06 AM	H2 MFC set to  0.000000
12/13/2012	10:10:06 AM	BCl3 MFC set to  0.000000
12/13/2012	10:10:06 AM	PH3 MFC set to  0.000000
12/13/2012	10:10:06 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:10:06 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:10:07 AM	Tube furnace set to 0
12/13/2012	10:10:37 AM	Helium valve closed
12/13/2012	10:10:37 AM	H2 valve closed
12/13/2012	10:10:37 AM	BCl3 valve closed
12/13/2012	10:10:37 AM	PH3 valve closed
12/13/2012	10:10:37 AM	SiCl4 pre valve closed
12/13/2012	10:10:37 AM	SiCl4 post valve closed
12/13/2012	10:10:37 AM	Bypass valve closed
12/13/2012	10:10:37 AM	Bubbler valve closed
12/13/2012	10:10:37 AM	Main Vac valve opened
12/13/2012	10:10:37 AM	Helium MFC set to  0.000000
12/13/2012	10:10:37 AM	H2 MFC set to  0.000000
12/13/2012	10:10:37 AM	BCl3 MFC set to  0.000000
12/13/2012	10:10:37 AM	PH3 MFC set to  0.000000
12/13/2012	10:10:37 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:10:37 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:10:37 AM	Tube furnace set to 0
12/13/2012	10:11:07 AM	H2 valve closed
12/13/2012	10:11:07 AM	BCl3 valve closed
12/13/2012	10:11:07 AM	PH3 valve closed
12/13/2012	10:11:07 AM	SiCl4 pre valve closed
12/13/2012	10:11:07 AM	SiCl4 post valve closed
12/13/2012	10:11:07 AM	Bypass valve closed
12/13/2012	10:11:07 AM	Bubbler valve closed
12/13/2012	10:11:07 AM	Helium valve opened
12/13/2012	10:11:07 AM	Main Vac valve opened
12/13/2012	10:11:07 AM	Helium MFC set to  20.000000
12/13/2012	10:11:07 AM	H2 MFC set to  0.000000
12/13/2012	10:11:07 AM	BCl3 MFC set to  0.000000
12/13/2012	10:11:07 AM	PH3 MFC set to  0.000000
12/13/2012	10:11:07 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:11:07 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:11:07 AM	Tube furnace set to 0
12/13/2012	10:11:37 AM	Helium valve closed
12/13/2012	10:11:37 AM	H2 valve closed
12/13/2012	10:11:37 AM	BCl3 valve closed
12/13/2012	10:11:37 AM	PH3 valve closed
12/13/2012	10:11:37 AM	SiCl4 pre valve closed
12/13/2012	10:11:37 AM	SiCl4 post valve closed
12/13/2012	10:11:37 AM	Bypass valve closed
12/13/2012	10:11:37 AM	Bubbler valve closed
12/13/2012	10:11:37 AM	Main Vac valve opened
12/13/2012	10:11:37 AM	Helium MFC set to  0.000000
12/13/2012	10:11:37 AM	H2 MFC set to  0.000000
12/13/2012	10:11:37 AM	BCl3 MFC set to  0.000000
12/13/2012	10:11:37 AM	PH3 MFC set to  0.000000
12/13/2012	10:11:37 AM	SiCl4 MFC set to  0.000000
12/13/2012	10:11:37 AM	Bypass solenoid MFC set to  0.000000
12/13/2012	10:11:37 AM	Tube furnace set to 0
12/13/2012	10:11:38 AM	Run finished at 10:11 AM
12/13/2012	10:11:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	12:04:38 PM	Main Vac valve closed
12/13/2012	12:05:20 PM	Main Vac valve opened
12/13/2012	12:09:54 PM	Recipe started at 12:09 PM
12/13/2012	12:09:54 PM	Helium valve closed
12/13/2012	12:09:54 PM	H2 valve closed
12/13/2012	12:09:54 PM	BCl3 valve closed
12/13/2012	12:09:54 PM	PH3 valve closed
12/13/2012	12:09:54 PM	SiCl4 pre valve closed
12/13/2012	12:09:54 PM	SiCl4 post valve closed
12/13/2012	12:09:54 PM	Main Vac valve closed
12/13/2012	12:09:54 PM	Bypass valve closed
12/13/2012	12:09:54 PM	Bubbler valve closed
12/13/2012	12:09:54 PM	Helium MFC set to  0.000000
12/13/2012	12:09:54 PM	H2 MFC set to  0.000000
12/13/2012	12:09:54 PM	BCl3 MFC set to  0.000000
12/13/2012	12:09:54 PM	PH3 MFC set to  0.000000
12/13/2012	12:09:54 PM	SiCl4 MFC set to  0.000000
12/13/2012	12:09:54 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	12:09:55 PM	Tube furnace set to 0
12/13/2012	12:09:58 PM	Helium valve closed
12/13/2012	12:09:58 PM	BCl3 valve closed
12/13/2012	12:09:58 PM	PH3 valve closed
12/13/2012	12:09:58 PM	SiCl4 pre valve closed
12/13/2012	12:09:58 PM	SiCl4 post valve closed
12/13/2012	12:09:58 PM	Main Vac valve closed
12/13/2012	12:09:58 PM	Bypass valve closed
12/13/2012	12:09:58 PM	Bubbler valve closed
12/13/2012	12:09:58 PM	H2 valve opened
12/13/2012	12:09:58 PM	Helium MFC set to  0.000000
12/13/2012	12:09:58 PM	H2 MFC set to  500.000000
12/13/2012	12:09:58 PM	BCl3 MFC set to  0.000000
12/13/2012	12:09:58 PM	PH3 MFC set to  0.000000
12/13/2012	12:09:58 PM	SiCl4 MFC set to  0.000000
12/13/2012	12:09:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	12:09:58 PM	Tube furnace set to 0
12/13/2012	12:11:14 PM	Helium valve closed
12/13/2012	12:11:14 PM	BCl3 valve closed
12/13/2012	12:11:14 PM	PH3 valve closed
12/13/2012	12:11:14 PM	SiCl4 pre valve closed
12/13/2012	12:11:14 PM	SiCl4 post valve closed
12/13/2012	12:11:14 PM	Main Vac valve closed
12/13/2012	12:11:14 PM	Bypass valve closed
12/13/2012	12:11:14 PM	H2 valve opened
12/13/2012	12:11:14 PM	Bubbler valve opened
12/13/2012	12:11:14 PM	Helium MFC set to  0.000000
12/13/2012	12:11:14 PM	H2 MFC set to  500.000000
12/13/2012	12:11:14 PM	BCl3 MFC set to  0.000000
12/13/2012	12:11:14 PM	PH3 MFC set to  0.000000
12/13/2012	12:11:14 PM	SiCl4 MFC set to  0.000000
12/13/2012	12:11:14 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	12:11:14 PM	Tube furnace set to 0
12/13/2012	12:11:15 PM	Helium valve closed
12/13/2012	12:11:15 PM	BCl3 valve closed
12/13/2012	12:11:15 PM	PH3 valve closed
12/13/2012	12:11:15 PM	SiCl4 pre valve closed
12/13/2012	12:11:15 PM	SiCl4 post valve closed
12/13/2012	12:11:15 PM	Main Vac valve closed
12/13/2012	12:11:15 PM	Bypass valve closed
12/13/2012	12:11:15 PM	H2 valve opened
12/13/2012	12:11:15 PM	Bubbler valve opened
12/13/2012	12:11:15 PM	Helium MFC set to  0.000000
12/13/2012	12:11:15 PM	H2 MFC set to  500.000000
12/13/2012	12:11:15 PM	BCl3 MFC set to  0.000000
12/13/2012	12:11:15 PM	PH3 MFC set to  0.000000
12/13/2012	12:11:15 PM	SiCl4 MFC set to  0.000000
12/13/2012	12:11:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	12:11:15 PM	Tube furnace set to 1000
12/13/2012	12:31:15 PM	Helium valve closed
12/13/2012	12:31:15 PM	BCl3 valve closed
12/13/2012	12:31:15 PM	PH3 valve closed
12/13/2012	12:31:15 PM	Main Vac valve closed
12/13/2012	12:31:15 PM	Bypass valve closed
12/13/2012	12:31:15 PM	H2 valve opened
12/13/2012	12:31:15 PM	SiCl4 pre valve opened
12/13/2012	12:31:15 PM	SiCl4 post valve opened
12/13/2012	12:31:15 PM	Bubbler valve opened
12/13/2012	12:31:15 PM	Helium MFC set to  0.000000
12/13/2012	12:31:15 PM	H2 MFC set to  500.000000
12/13/2012	12:31:15 PM	BCl3 MFC set to  0.000000
12/13/2012	12:31:15 PM	PH3 MFC set to  0.000000
12/13/2012	12:31:15 PM	SiCl4 MFC set to  50.000000
12/13/2012	12:31:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	12:31:15 PM	Tube furnace set to 1000
12/13/2012	12:51:15 PM	Helium valve closed
12/13/2012	12:51:15 PM	BCl3 valve closed
12/13/2012	12:51:15 PM	SiCl4 pre valve closed
12/13/2012	12:51:15 PM	SiCl4 post valve closed
12/13/2012	12:51:15 PM	Main Vac valve closed
12/13/2012	12:51:15 PM	Bypass valve closed
12/13/2012	12:51:15 PM	H2 valve opened
12/13/2012	12:51:15 PM	PH3 valve opened
12/13/2012	12:51:15 PM	Bubbler valve opened
12/13/2012	12:51:15 PM	Helium MFC set to  0.000000
12/13/2012	12:51:15 PM	H2 MFC set to  500.000000
12/13/2012	12:51:15 PM	BCl3 MFC set to  0.000000
12/13/2012	12:51:15 PM	PH3 MFC set to  20.000000
12/13/2012	12:51:15 PM	SiCl4 MFC set to  0.000000
12/13/2012	12:51:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	12:51:15 PM	Tube furnace set to 1000
12/13/2012	1:07:15 PM	Helium valve closed
12/13/2012	1:07:15 PM	BCl3 valve closed
12/13/2012	1:07:15 PM	PH3 valve closed
12/13/2012	1:07:15 PM	SiCl4 pre valve closed
12/13/2012	1:07:15 PM	SiCl4 post valve closed
12/13/2012	1:07:15 PM	Main Vac valve closed
12/13/2012	1:07:15 PM	Bypass valve closed
12/13/2012	1:07:15 PM	H2 valve opened
12/13/2012	1:07:15 PM	Bubbler valve opened
12/13/2012	1:07:16 PM	Helium MFC set to  0.000000
12/13/2012	1:07:16 PM	H2 MFC set to  500.000000
12/13/2012	1:07:16 PM	BCl3 MFC set to  0.000000
12/13/2012	1:07:16 PM	PH3 MFC set to  0.000000
12/13/2012	1:07:16 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:07:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:07:16 PM	Tube furnace set to 950
12/13/2012	1:09:16 PM	Helium valve closed
12/13/2012	1:09:16 PM	BCl3 valve closed
12/13/2012	1:09:16 PM	PH3 valve closed
12/13/2012	1:09:16 PM	SiCl4 pre valve closed
12/13/2012	1:09:16 PM	SiCl4 post valve closed
12/13/2012	1:09:16 PM	Main Vac valve closed
12/13/2012	1:09:16 PM	Bypass valve closed
12/13/2012	1:09:16 PM	H2 valve opened
12/13/2012	1:09:16 PM	Bubbler valve opened
12/13/2012	1:09:16 PM	Helium MFC set to  0.000000
12/13/2012	1:09:16 PM	H2 MFC set to  500.000000
12/13/2012	1:09:16 PM	BCl3 MFC set to  0.000000
12/13/2012	1:09:16 PM	PH3 MFC set to  0.000000
12/13/2012	1:09:16 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:09:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:09:16 PM	Tube furnace set to 900
12/13/2012	1:11:16 PM	Helium valve closed
12/13/2012	1:11:16 PM	BCl3 valve closed
12/13/2012	1:11:16 PM	PH3 valve closed
12/13/2012	1:11:16 PM	SiCl4 pre valve closed
12/13/2012	1:11:16 PM	SiCl4 post valve closed
12/13/2012	1:11:16 PM	Main Vac valve closed
12/13/2012	1:11:16 PM	Bypass valve closed
12/13/2012	1:11:16 PM	H2 valve opened
12/13/2012	1:11:16 PM	Bubbler valve opened
12/13/2012	1:11:16 PM	Helium MFC set to  0.000000
12/13/2012	1:11:16 PM	H2 MFC set to  500.000000
12/13/2012	1:11:16 PM	BCl3 MFC set to  0.000000
12/13/2012	1:11:16 PM	PH3 MFC set to  0.000000
12/13/2012	1:11:16 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:11:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:11:16 PM	Tube furnace set to 850
12/13/2012	1:13:16 PM	H2 valve closed
12/13/2012	1:13:16 PM	BCl3 valve closed
12/13/2012	1:13:16 PM	PH3 valve closed
12/13/2012	1:13:16 PM	SiCl4 pre valve closed
12/13/2012	1:13:16 PM	SiCl4 post valve closed
12/13/2012	1:13:16 PM	Main Vac valve closed
12/13/2012	1:13:16 PM	Bypass valve closed
12/13/2012	1:13:16 PM	Helium valve opened
12/13/2012	1:13:16 PM	Bubbler valve opened
12/13/2012	1:13:16 PM	Helium MFC set to  500.000000
12/13/2012	1:13:16 PM	H2 MFC set to  0.000000
12/13/2012	1:13:16 PM	BCl3 MFC set to  0.000000
12/13/2012	1:13:16 PM	PH3 MFC set to  0.000000
12/13/2012	1:13:16 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:13:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:13:16 PM	Tube furnace set to 800
12/13/2012	1:15:16 PM	H2 valve closed
12/13/2012	1:15:16 PM	BCl3 valve closed
12/13/2012	1:15:16 PM	PH3 valve closed
12/13/2012	1:15:16 PM	SiCl4 pre valve closed
12/13/2012	1:15:16 PM	SiCl4 post valve closed
12/13/2012	1:15:16 PM	Main Vac valve closed
12/13/2012	1:15:16 PM	Bypass valve closed
12/13/2012	1:15:16 PM	Helium valve opened
12/13/2012	1:15:16 PM	Bubbler valve opened
12/13/2012	1:15:16 PM	Helium MFC set to  500.000000
12/13/2012	1:15:16 PM	H2 MFC set to  0.000000
12/13/2012	1:15:16 PM	BCl3 MFC set to  0.000000
12/13/2012	1:15:16 PM	PH3 MFC set to  0.000000
12/13/2012	1:15:16 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:15:16 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:15:17 PM	Tube furnace set to 750
12/13/2012	1:17:17 PM	H2 valve closed
12/13/2012	1:17:17 PM	BCl3 valve closed
12/13/2012	1:17:17 PM	PH3 valve closed
12/13/2012	1:17:17 PM	SiCl4 pre valve closed
12/13/2012	1:17:17 PM	SiCl4 post valve closed
12/13/2012	1:17:17 PM	Main Vac valve closed
12/13/2012	1:17:17 PM	Bypass valve closed
12/13/2012	1:17:17 PM	Helium valve opened
12/13/2012	1:17:17 PM	Bubbler valve opened
12/13/2012	1:17:17 PM	Helium MFC set to  500.000000
12/13/2012	1:17:17 PM	H2 MFC set to  0.000000
12/13/2012	1:17:17 PM	BCl3 MFC set to  0.000000
12/13/2012	1:17:17 PM	PH3 MFC set to  0.000000
12/13/2012	1:17:17 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:17:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:17:17 PM	Tube furnace set to 0
12/13/2012	1:37:17 PM	Helium valve closed
12/13/2012	1:37:17 PM	H2 valve closed
12/13/2012	1:37:17 PM	BCl3 valve closed
12/13/2012	1:37:17 PM	PH3 valve closed
12/13/2012	1:37:17 PM	SiCl4 pre valve closed
12/13/2012	1:37:17 PM	SiCl4 post valve closed
12/13/2012	1:37:17 PM	Main Vac valve closed
12/13/2012	1:37:17 PM	Bypass valve closed
12/13/2012	1:37:17 PM	Bubbler valve closed
12/13/2012	1:37:17 PM	Helium MFC set to  0.000000
12/13/2012	1:37:17 PM	H2 MFC set to  0.000000
12/13/2012	1:37:17 PM	BCl3 MFC set to  0.000000
12/13/2012	1:37:17 PM	PH3 MFC set to  0.000000
12/13/2012	1:37:17 PM	SiCl4 MFC set to  0.000000
12/13/2012	1:37:17 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	1:37:17 PM	Tube furnace set to 0
12/13/2012	1:37:18 PM	Run finished at 1:37 PM
12/13/2012	2:59:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2012	2:59:03 PM	Recipe started at 2:59 PM
12/13/2012	2:59:03 PM	Helium valve closed
12/13/2012	2:59:03 PM	H2 valve closed
12/13/2012	2:59:03 PM	BCl3 valve closed
12/13/2012	2:59:03 PM	PH3 valve closed
12/13/2012	2:59:03 PM	SiCl4 pre valve closed
12/13/2012	2:59:03 PM	SiCl4 post valve closed
12/13/2012	2:59:03 PM	Main Vac valve closed
12/13/2012	2:59:03 PM	Bypass valve closed
12/13/2012	2:59:03 PM	Bubbler valve closed
12/13/2012	2:59:03 PM	Helium MFC set to  0.000000
12/13/2012	2:59:03 PM	H2 MFC set to  0.000000
12/13/2012	2:59:03 PM	BCl3 MFC set to  0.000000
12/13/2012	2:59:03 PM	PH3 MFC set to  0.000000
12/13/2012	2:59:03 PM	SiCl4 MFC set to  0.000000
12/13/2012	2:59:03 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	2:59:03 PM	Tube furnace set to 0
12/13/2012	2:59:06 PM	H2 valve closed
12/13/2012	2:59:06 PM	BCl3 valve closed
12/13/2012	2:59:06 PM	PH3 valve closed
12/13/2012	2:59:06 PM	SiCl4 pre valve closed
12/13/2012	2:59:06 PM	SiCl4 post valve closed
12/13/2012	2:59:06 PM	Main Vac valve closed
12/13/2012	2:59:06 PM	Bypass valve closed
12/13/2012	2:59:06 PM	Bubbler valve closed
12/13/2012	2:59:06 PM	Helium valve opened
12/13/2012	2:59:06 PM	Helium MFC set to  500.000000
12/13/2012	2:59:06 PM	H2 MFC set to  0.000000
12/13/2012	2:59:06 PM	BCl3 MFC set to  0.000000
12/13/2012	2:59:06 PM	PH3 MFC set to  0.000000
12/13/2012	2:59:06 PM	SiCl4 MFC set to  0.000000
12/13/2012	2:59:06 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	2:59:07 PM	Tube furnace set to 0
12/13/2012	2:59:15 PM	Helium valve closed
12/13/2012	2:59:15 PM	H2 valve closed
12/13/2012	2:59:15 PM	BCl3 valve closed
12/13/2012	2:59:15 PM	PH3 valve closed
12/13/2012	2:59:15 PM	SiCl4 pre valve closed
12/13/2012	2:59:15 PM	SiCl4 post valve closed
12/13/2012	2:59:15 PM	Main Vac valve closed
12/13/2012	2:59:15 PM	Bypass valve closed
12/13/2012	2:59:15 PM	Bubbler valve closed
12/13/2012	2:59:15 PM	Helium MFC set to  0.000000
12/13/2012	2:59:15 PM	H2 MFC set to  0.000000
12/13/2012	2:59:15 PM	BCl3 MFC set to  0.000000
12/13/2012	2:59:15 PM	PH3 MFC set to  0.000000
12/13/2012	2:59:15 PM	SiCl4 MFC set to  0.000000
12/13/2012	2:59:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	2:59:15 PM	Tube furnace set to 0
12/13/2012	2:59:16 PM	Run finished at 2:59 PM
12/13/2012	2:59:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2012	3:04:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2012	3:04:04 PM	Recipe started at 3:04 PM
12/13/2012	3:04:04 PM	Helium valve closed
12/13/2012	3:04:04 PM	H2 valve closed
12/13/2012	3:04:04 PM	BCl3 valve closed
12/13/2012	3:04:04 PM	PH3 valve closed
12/13/2012	3:04:04 PM	SiCl4 pre valve closed
12/13/2012	3:04:04 PM	SiCl4 post valve closed
12/13/2012	3:04:04 PM	Main Vac valve closed
12/13/2012	3:04:04 PM	Bubbler valve closed
12/13/2012	3:04:04 PM	Bypass valve opened
12/13/2012	3:04:04 PM	Helium MFC set to  0.000000
12/13/2012	3:04:04 PM	H2 MFC set to  0.000000
12/13/2012	3:04:04 PM	BCl3 MFC set to  0.000000
12/13/2012	3:04:04 PM	PH3 MFC set to  0.000000
12/13/2012	3:04:04 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:04:04 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:04:05 PM	Tube furnace set to 0
12/13/2012	3:05:30 PM	Helium valve closed
12/13/2012	3:05:30 PM	H2 valve closed
12/13/2012	3:05:30 PM	BCl3 valve closed
12/13/2012	3:05:30 PM	PH3 valve closed
12/13/2012	3:05:30 PM	SiCl4 pre valve closed
12/13/2012	3:05:30 PM	SiCl4 post valve closed
12/13/2012	3:05:30 PM	Main Vac valve closed
12/13/2012	3:05:30 PM	Bubbler valve closed
12/13/2012	3:05:30 PM	Bypass valve opened
12/13/2012	3:05:30 PM	Helium MFC set to  0.000000
12/13/2012	3:05:30 PM	H2 MFC set to  0.000000
12/13/2012	3:05:30 PM	BCl3 MFC set to  0.000000
12/13/2012	3:05:30 PM	PH3 MFC set to  0.000000
12/13/2012	3:05:30 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:05:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:05:31 PM	Tube furnace set to 0
12/13/2012	3:06:31 PM	Helium valve closed
12/13/2012	3:06:31 PM	H2 valve closed
12/13/2012	3:06:31 PM	BCl3 valve closed
12/13/2012	3:06:31 PM	PH3 valve closed
12/13/2012	3:06:31 PM	SiCl4 pre valve closed
12/13/2012	3:06:31 PM	SiCl4 post valve closed
12/13/2012	3:06:31 PM	Bypass valve closed
12/13/2012	3:06:31 PM	Bubbler valve closed
12/13/2012	3:06:31 PM	Main Vac valve opened
12/13/2012	3:06:31 PM	Helium MFC set to  0.000000
12/13/2012	3:06:31 PM	H2 MFC set to  0.000000
12/13/2012	3:06:31 PM	BCl3 MFC set to  0.000000
12/13/2012	3:06:31 PM	PH3 MFC set to  0.000000
12/13/2012	3:06:31 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:06:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:06:31 PM	Tube furnace set to 0
12/13/2012	3:06:32 PM	Run finished at 3:06 PM
12/13/2012	3:06:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2012	3:07:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	3:07:56 PM	Recipe started at 3:07 PM
12/13/2012	3:07:56 PM	Helium valve closed
12/13/2012	3:07:56 PM	H2 valve closed
12/13/2012	3:07:56 PM	BCl3 valve closed
12/13/2012	3:07:56 PM	PH3 valve closed
12/13/2012	3:07:56 PM	SiCl4 pre valve closed
12/13/2012	3:07:56 PM	SiCl4 post valve closed
12/13/2012	3:07:56 PM	Main Vac valve closed
12/13/2012	3:07:56 PM	Bubbler valve closed
12/13/2012	3:07:56 PM	Bypass valve opened
12/13/2012	3:07:56 PM	Helium MFC set to  0.000000
12/13/2012	3:07:56 PM	H2 MFC set to  0.000000
12/13/2012	3:07:56 PM	BCl3 MFC set to  0.000000
12/13/2012	3:07:56 PM	PH3 MFC set to  0.000000
12/13/2012	3:07:56 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:07:56 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:07:56 PM	Tube furnace set to 0
12/13/2012	3:07:57 PM	Helium valve closed
12/13/2012	3:07:57 PM	H2 valve closed
12/13/2012	3:07:57 PM	BCl3 valve closed
12/13/2012	3:07:57 PM	PH3 valve closed
12/13/2012	3:07:57 PM	SiCl4 pre valve closed
12/13/2012	3:07:57 PM	SiCl4 post valve closed
12/13/2012	3:07:57 PM	Main Vac valve closed
12/13/2012	3:07:57 PM	Bubbler valve closed
12/13/2012	3:07:57 PM	Bypass valve opened
12/13/2012	3:07:57 PM	Helium MFC set to  0.000000
12/13/2012	3:07:57 PM	H2 MFC set to  0.000000
12/13/2012	3:07:57 PM	BCl3 MFC set to  0.000000
12/13/2012	3:07:57 PM	PH3 MFC set to  0.000000
12/13/2012	3:07:57 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:07:57 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:07:57 PM	Tube furnace set to 0
12/13/2012	3:08:27 PM	Helium valve closed
12/13/2012	3:08:27 PM	H2 valve closed
12/13/2012	3:08:27 PM	BCl3 valve closed
12/13/2012	3:08:27 PM	PH3 valve closed
12/13/2012	3:08:27 PM	SiCl4 pre valve closed
12/13/2012	3:08:27 PM	SiCl4 post valve closed
12/13/2012	3:08:27 PM	Bypass valve closed
12/13/2012	3:08:27 PM	Bubbler valve closed
12/13/2012	3:08:27 PM	Main Vac valve opened
12/13/2012	3:08:27 PM	Helium MFC set to  0.000000
12/13/2012	3:08:27 PM	H2 MFC set to  0.000000
12/13/2012	3:08:27 PM	BCl3 MFC set to  0.000000
12/13/2012	3:08:27 PM	PH3 MFC set to  0.000000
12/13/2012	3:08:27 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:08:27 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:08:27 PM	Tube furnace set to 0
12/13/2012	3:08:57 PM	H2 valve closed
12/13/2012	3:08:57 PM	BCl3 valve closed
12/13/2012	3:08:57 PM	PH3 valve closed
12/13/2012	3:08:57 PM	SiCl4 pre valve closed
12/13/2012	3:08:57 PM	SiCl4 post valve closed
12/13/2012	3:08:57 PM	Bypass valve closed
12/13/2012	3:08:57 PM	Bubbler valve closed
12/13/2012	3:08:57 PM	Helium valve opened
12/13/2012	3:08:57 PM	Main Vac valve opened
12/13/2012	3:08:57 PM	Helium MFC set to  20.000000
12/13/2012	3:08:57 PM	H2 MFC set to  0.000000
12/13/2012	3:08:57 PM	BCl3 MFC set to  0.000000
12/13/2012	3:08:57 PM	PH3 MFC set to  0.000000
12/13/2012	3:08:57 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:08:57 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:08:57 PM	Tube furnace set to 0
12/13/2012	3:09:27 PM	Helium valve closed
12/13/2012	3:09:27 PM	H2 valve closed
12/13/2012	3:09:27 PM	BCl3 valve closed
12/13/2012	3:09:27 PM	PH3 valve closed
12/13/2012	3:09:27 PM	SiCl4 pre valve closed
12/13/2012	3:09:27 PM	SiCl4 post valve closed
12/13/2012	3:09:27 PM	Bypass valve closed
12/13/2012	3:09:27 PM	Bubbler valve closed
12/13/2012	3:09:27 PM	Main Vac valve opened
12/13/2012	3:09:27 PM	Helium MFC set to  0.000000
12/13/2012	3:09:27 PM	H2 MFC set to  0.000000
12/13/2012	3:09:27 PM	BCl3 MFC set to  0.000000
12/13/2012	3:09:27 PM	PH3 MFC set to  0.000000
12/13/2012	3:09:27 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:09:27 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:09:28 PM	Tube furnace set to 0
12/13/2012	3:09:57 PM	H2 valve closed
12/13/2012	3:09:57 PM	BCl3 valve closed
12/13/2012	3:09:57 PM	PH3 valve closed
12/13/2012	3:09:57 PM	SiCl4 pre valve closed
12/13/2012	3:09:57 PM	SiCl4 post valve closed
12/13/2012	3:09:57 PM	Bypass valve closed
12/13/2012	3:09:57 PM	Bubbler valve closed
12/13/2012	3:09:57 PM	Helium valve opened
12/13/2012	3:09:57 PM	Main Vac valve opened
12/13/2012	3:09:57 PM	Helium MFC set to  20.000000
12/13/2012	3:09:57 PM	H2 MFC set to  0.000000
12/13/2012	3:09:58 PM	BCl3 MFC set to  0.000000
12/13/2012	3:09:58 PM	PH3 MFC set to  0.000000
12/13/2012	3:09:58 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:09:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:09:58 PM	Tube furnace set to 0
12/13/2012	3:10:28 PM	Helium valve closed
12/13/2012	3:10:28 PM	H2 valve closed
12/13/2012	3:10:28 PM	BCl3 valve closed
12/13/2012	3:10:28 PM	PH3 valve closed
12/13/2012	3:10:28 PM	SiCl4 pre valve closed
12/13/2012	3:10:28 PM	SiCl4 post valve closed
12/13/2012	3:10:28 PM	Bypass valve closed
12/13/2012	3:10:28 PM	Bubbler valve closed
12/13/2012	3:10:28 PM	Main Vac valve opened
12/13/2012	3:10:28 PM	Helium MFC set to  0.000000
12/13/2012	3:10:28 PM	H2 MFC set to  0.000000
12/13/2012	3:10:28 PM	BCl3 MFC set to  0.000000
12/13/2012	3:10:28 PM	PH3 MFC set to  0.000000
12/13/2012	3:10:28 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:10:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:10:28 PM	Tube furnace set to 0
12/13/2012	3:10:58 PM	H2 valve closed
12/13/2012	3:10:58 PM	BCl3 valve closed
12/13/2012	3:10:58 PM	PH3 valve closed
12/13/2012	3:10:58 PM	SiCl4 pre valve closed
12/13/2012	3:10:58 PM	SiCl4 post valve closed
12/13/2012	3:10:58 PM	Bypass valve closed
12/13/2012	3:10:58 PM	Bubbler valve closed
12/13/2012	3:10:58 PM	Helium valve opened
12/13/2012	3:10:58 PM	Main Vac valve opened
12/13/2012	3:10:58 PM	Helium MFC set to  20.000000
12/13/2012	3:10:58 PM	H2 MFC set to  0.000000
12/13/2012	3:10:58 PM	BCl3 MFC set to  0.000000
12/13/2012	3:10:58 PM	PH3 MFC set to  0.000000
12/13/2012	3:10:58 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:10:58 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:10:58 PM	Tube furnace set to 0
12/13/2012	3:11:28 PM	Helium valve closed
12/13/2012	3:11:28 PM	H2 valve closed
12/13/2012	3:11:28 PM	BCl3 valve closed
12/13/2012	3:11:28 PM	PH3 valve closed
12/13/2012	3:11:28 PM	SiCl4 pre valve closed
12/13/2012	3:11:28 PM	SiCl4 post valve closed
12/13/2012	3:11:28 PM	Bypass valve closed
12/13/2012	3:11:28 PM	Bubbler valve closed
12/13/2012	3:11:28 PM	Main Vac valve opened
12/13/2012	3:11:28 PM	Helium MFC set to  0.000000
12/13/2012	3:11:28 PM	H2 MFC set to  0.000000
12/13/2012	3:11:28 PM	BCl3 MFC set to  0.000000
12/13/2012	3:11:28 PM	PH3 MFC set to  0.000000
12/13/2012	3:11:28 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:11:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:11:29 PM	Tube furnace set to 0
12/13/2012	3:11:59 PM	H2 valve closed
12/13/2012	3:11:59 PM	BCl3 valve closed
12/13/2012	3:11:59 PM	PH3 valve closed
12/13/2012	3:11:59 PM	SiCl4 pre valve closed
12/13/2012	3:11:59 PM	SiCl4 post valve closed
12/13/2012	3:11:59 PM	Bypass valve closed
12/13/2012	3:11:59 PM	Bubbler valve closed
12/13/2012	3:11:59 PM	Helium valve opened
12/13/2012	3:11:59 PM	Main Vac valve opened
12/13/2012	3:11:59 PM	Helium MFC set to  20.000000
12/13/2012	3:11:59 PM	H2 MFC set to  0.000000
12/13/2012	3:11:59 PM	BCl3 MFC set to  0.000000
12/13/2012	3:11:59 PM	PH3 MFC set to  0.000000
12/13/2012	3:11:59 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:11:59 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:11:59 PM	Tube furnace set to 0
12/13/2012	3:12:29 PM	Helium valve closed
12/13/2012	3:12:29 PM	H2 valve closed
12/13/2012	3:12:29 PM	BCl3 valve closed
12/13/2012	3:12:29 PM	PH3 valve closed
12/13/2012	3:12:29 PM	SiCl4 pre valve closed
12/13/2012	3:12:29 PM	SiCl4 post valve closed
12/13/2012	3:12:29 PM	Bypass valve closed
12/13/2012	3:12:29 PM	Bubbler valve closed
12/13/2012	3:12:29 PM	Main Vac valve opened
12/13/2012	3:12:29 PM	Helium MFC set to  0.000000
12/13/2012	3:12:29 PM	H2 MFC set to  0.000000
12/13/2012	3:12:29 PM	BCl3 MFC set to  0.000000
12/13/2012	3:12:29 PM	PH3 MFC set to  0.000000
12/13/2012	3:12:29 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:12:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:12:29 PM	Tube furnace set to 0
12/13/2012	3:12:59 PM	H2 valve closed
12/13/2012	3:12:59 PM	BCl3 valve closed
12/13/2012	3:12:59 PM	PH3 valve closed
12/13/2012	3:12:59 PM	SiCl4 pre valve closed
12/13/2012	3:12:59 PM	SiCl4 post valve closed
12/13/2012	3:12:59 PM	Bypass valve closed
12/13/2012	3:12:59 PM	Bubbler valve closed
12/13/2012	3:12:59 PM	Helium valve opened
12/13/2012	3:12:59 PM	Main Vac valve opened
12/13/2012	3:12:59 PM	Helium MFC set to  20.000000
12/13/2012	3:12:59 PM	H2 MFC set to  0.000000
12/13/2012	3:12:59 PM	BCl3 MFC set to  0.000000
12/13/2012	3:12:59 PM	PH3 MFC set to  0.000000
12/13/2012	3:12:59 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:12:59 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:12:59 PM	Tube furnace set to 0
12/13/2012	3:13:29 PM	Helium valve closed
12/13/2012	3:13:29 PM	H2 valve closed
12/13/2012	3:13:29 PM	BCl3 valve closed
12/13/2012	3:13:29 PM	PH3 valve closed
12/13/2012	3:13:29 PM	SiCl4 pre valve closed
12/13/2012	3:13:29 PM	SiCl4 post valve closed
12/13/2012	3:13:29 PM	Bypass valve closed
12/13/2012	3:13:29 PM	Bubbler valve closed
12/13/2012	3:13:29 PM	Main Vac valve opened
12/13/2012	3:13:29 PM	Helium MFC set to  0.000000
12/13/2012	3:13:29 PM	H2 MFC set to  0.000000
12/13/2012	3:13:29 PM	BCl3 MFC set to  0.000000
12/13/2012	3:13:29 PM	PH3 MFC set to  0.000000
12/13/2012	3:13:29 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:13:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:13:29 PM	Tube furnace set to 0
12/13/2012	3:14:00 PM	H2 valve closed
12/13/2012	3:14:00 PM	BCl3 valve closed
12/13/2012	3:14:00 PM	PH3 valve closed
12/13/2012	3:14:00 PM	SiCl4 pre valve closed
12/13/2012	3:14:00 PM	SiCl4 post valve closed
12/13/2012	3:14:00 PM	Bypass valve closed
12/13/2012	3:14:00 PM	Bubbler valve closed
12/13/2012	3:14:00 PM	Helium valve opened
12/13/2012	3:14:00 PM	Main Vac valve opened
12/13/2012	3:14:00 PM	Helium MFC set to  20.000000
12/13/2012	3:14:00 PM	H2 MFC set to  0.000000
12/13/2012	3:14:00 PM	BCl3 MFC set to  0.000000
12/13/2012	3:14:00 PM	PH3 MFC set to  0.000000
12/13/2012	3:14:00 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:14:00 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:14:00 PM	Tube furnace set to 0
12/13/2012	3:14:30 PM	Helium valve closed
12/13/2012	3:14:30 PM	H2 valve closed
12/13/2012	3:14:30 PM	BCl3 valve closed
12/13/2012	3:14:30 PM	PH3 valve closed
12/13/2012	3:14:30 PM	SiCl4 pre valve closed
12/13/2012	3:14:30 PM	SiCl4 post valve closed
12/13/2012	3:14:30 PM	Bypass valve closed
12/13/2012	3:14:30 PM	Bubbler valve closed
12/13/2012	3:14:30 PM	Main Vac valve opened
12/13/2012	3:14:30 PM	Helium MFC set to  0.000000
12/13/2012	3:14:30 PM	H2 MFC set to  0.000000
12/13/2012	3:14:30 PM	BCl3 MFC set to  0.000000
12/13/2012	3:14:30 PM	PH3 MFC set to  0.000000
12/13/2012	3:14:30 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:14:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:14:30 PM	Tube furnace set to 0
12/13/2012	3:15:00 PM	H2 valve closed
12/13/2012	3:15:00 PM	BCl3 valve closed
12/13/2012	3:15:00 PM	PH3 valve closed
12/13/2012	3:15:00 PM	SiCl4 pre valve closed
12/13/2012	3:15:00 PM	SiCl4 post valve closed
12/13/2012	3:15:00 PM	Bypass valve closed
12/13/2012	3:15:00 PM	Bubbler valve closed
12/13/2012	3:15:00 PM	Helium valve opened
12/13/2012	3:15:00 PM	Main Vac valve opened
12/13/2012	3:15:00 PM	Helium MFC set to  20.000000
12/13/2012	3:15:00 PM	H2 MFC set to  0.000000
12/13/2012	3:15:00 PM	BCl3 MFC set to  0.000000
12/13/2012	3:15:00 PM	PH3 MFC set to  0.000000
12/13/2012	3:15:00 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:15:00 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:15:00 PM	Tube furnace set to 0
12/13/2012	3:15:30 PM	Helium valve closed
12/13/2012	3:15:30 PM	H2 valve closed
12/13/2012	3:15:30 PM	BCl3 valve closed
12/13/2012	3:15:30 PM	PH3 valve closed
12/13/2012	3:15:30 PM	SiCl4 pre valve closed
12/13/2012	3:15:30 PM	SiCl4 post valve closed
12/13/2012	3:15:30 PM	Bypass valve closed
12/13/2012	3:15:30 PM	Bubbler valve closed
12/13/2012	3:15:30 PM	Main Vac valve opened
12/13/2012	3:15:30 PM	Helium MFC set to  0.000000
12/13/2012	3:15:30 PM	H2 MFC set to  0.000000
12/13/2012	3:15:30 PM	BCl3 MFC set to  0.000000
12/13/2012	3:15:30 PM	PH3 MFC set to  0.000000
12/13/2012	3:15:30 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:15:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:15:31 PM	Tube furnace set to 0
12/13/2012	3:16:01 PM	H2 valve closed
12/13/2012	3:16:01 PM	BCl3 valve closed
12/13/2012	3:16:01 PM	PH3 valve closed
12/13/2012	3:16:01 PM	SiCl4 pre valve closed
12/13/2012	3:16:01 PM	SiCl4 post valve closed
12/13/2012	3:16:01 PM	Bypass valve closed
12/13/2012	3:16:01 PM	Bubbler valve closed
12/13/2012	3:16:01 PM	Helium valve opened
12/13/2012	3:16:01 PM	Main Vac valve opened
12/13/2012	3:16:01 PM	Helium MFC set to  20.000000
12/13/2012	3:16:01 PM	H2 MFC set to  0.000000
12/13/2012	3:16:01 PM	BCl3 MFC set to  0.000000
12/13/2012	3:16:01 PM	PH3 MFC set to  0.000000
12/13/2012	3:16:01 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:16:01 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:16:01 PM	Tube furnace set to 0
12/13/2012	3:16:31 PM	Helium valve closed
12/13/2012	3:16:31 PM	H2 valve closed
12/13/2012	3:16:31 PM	BCl3 valve closed
12/13/2012	3:16:31 PM	PH3 valve closed
12/13/2012	3:16:31 PM	SiCl4 pre valve closed
12/13/2012	3:16:31 PM	SiCl4 post valve closed
12/13/2012	3:16:31 PM	Bypass valve closed
12/13/2012	3:16:31 PM	Bubbler valve closed
12/13/2012	3:16:31 PM	Main Vac valve opened
12/13/2012	3:16:31 PM	Helium MFC set to  0.000000
12/13/2012	3:16:31 PM	H2 MFC set to  0.000000
12/13/2012	3:16:31 PM	BCl3 MFC set to  0.000000
12/13/2012	3:16:31 PM	PH3 MFC set to  0.000000
12/13/2012	3:16:31 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:16:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:16:31 PM	Tube furnace set to 0
12/13/2012	3:17:01 PM	H2 valve closed
12/13/2012	3:17:01 PM	BCl3 valve closed
12/13/2012	3:17:01 PM	PH3 valve closed
12/13/2012	3:17:01 PM	SiCl4 pre valve closed
12/13/2012	3:17:01 PM	SiCl4 post valve closed
12/13/2012	3:17:01 PM	Bypass valve closed
12/13/2012	3:17:01 PM	Bubbler valve closed
12/13/2012	3:17:01 PM	Helium valve opened
12/13/2012	3:17:01 PM	Main Vac valve opened
12/13/2012	3:17:01 PM	Helium MFC set to  20.000000
12/13/2012	3:17:01 PM	H2 MFC set to  0.000000
12/13/2012	3:17:01 PM	BCl3 MFC set to  0.000000
12/13/2012	3:17:01 PM	PH3 MFC set to  0.000000
12/13/2012	3:17:01 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:17:01 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:17:01 PM	Tube furnace set to 0
12/13/2012	3:17:31 PM	Helium valve closed
12/13/2012	3:17:31 PM	H2 valve closed
12/13/2012	3:17:31 PM	BCl3 valve closed
12/13/2012	3:17:31 PM	PH3 valve closed
12/13/2012	3:17:31 PM	SiCl4 pre valve closed
12/13/2012	3:17:31 PM	SiCl4 post valve closed
12/13/2012	3:17:31 PM	Bypass valve closed
12/13/2012	3:17:31 PM	Bubbler valve closed
12/13/2012	3:17:31 PM	Main Vac valve opened
12/13/2012	3:17:31 PM	Helium MFC set to  0.000000
12/13/2012	3:17:31 PM	H2 MFC set to  0.000000
12/13/2012	3:17:31 PM	BCl3 MFC set to  0.000000
12/13/2012	3:17:31 PM	PH3 MFC set to  0.000000
12/13/2012	3:17:31 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:17:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:17:32 PM	Tube furnace set to 0
12/13/2012	3:18:02 PM	H2 valve closed
12/13/2012	3:18:02 PM	BCl3 valve closed
12/13/2012	3:18:02 PM	PH3 valve closed
12/13/2012	3:18:02 PM	SiCl4 pre valve closed
12/13/2012	3:18:02 PM	SiCl4 post valve closed
12/13/2012	3:18:02 PM	Bypass valve closed
12/13/2012	3:18:02 PM	Bubbler valve closed
12/13/2012	3:18:02 PM	Helium valve opened
12/13/2012	3:18:02 PM	Main Vac valve opened
12/13/2012	3:18:02 PM	Helium MFC set to  20.000000
12/13/2012	3:18:02 PM	H2 MFC set to  0.000000
12/13/2012	3:18:02 PM	BCl3 MFC set to  0.000000
12/13/2012	3:18:02 PM	PH3 MFC set to  0.000000
12/13/2012	3:18:02 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:18:02 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:18:02 PM	Tube furnace set to 0
12/13/2012	3:18:32 PM	Helium valve closed
12/13/2012	3:18:32 PM	H2 valve closed
12/13/2012	3:18:32 PM	BCl3 valve closed
12/13/2012	3:18:32 PM	PH3 valve closed
12/13/2012	3:18:32 PM	SiCl4 pre valve closed
12/13/2012	3:18:32 PM	SiCl4 post valve closed
12/13/2012	3:18:32 PM	Bypass valve closed
12/13/2012	3:18:32 PM	Bubbler valve closed
12/13/2012	3:18:32 PM	Main Vac valve opened
12/13/2012	3:18:32 PM	Helium MFC set to  0.000000
12/13/2012	3:18:32 PM	H2 MFC set to  0.000000
12/13/2012	3:18:32 PM	BCl3 MFC set to  0.000000
12/13/2012	3:18:32 PM	PH3 MFC set to  0.000000
12/13/2012	3:18:32 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:18:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:18:32 PM	Tube furnace set to 0
12/13/2012	3:18:33 PM	Run finished at 3:18 PM
12/13/2012	3:18:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	3:18:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	3:19:05 PM	Recipe started at 3:18 PM
12/13/2012	3:19:05 PM	Helium valve closed
12/13/2012	3:19:05 PM	H2 valve closed
12/13/2012	3:19:05 PM	BCl3 valve closed
12/13/2012	3:19:05 PM	PH3 valve closed
12/13/2012	3:19:05 PM	SiCl4 pre valve closed
12/13/2012	3:19:05 PM	SiCl4 post valve closed
12/13/2012	3:19:05 PM	Main Vac valve closed
12/13/2012	3:19:05 PM	Bubbler valve closed
12/13/2012	3:19:05 PM	Bypass valve opened
12/13/2012	3:19:05 PM	Helium MFC set to  0.000000
12/13/2012	3:19:05 PM	H2 MFC set to  0.000000
12/13/2012	3:19:05 PM	BCl3 MFC set to  0.000000
12/13/2012	3:19:05 PM	PH3 MFC set to  0.000000
12/13/2012	3:19:05 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:19:05 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:19:05 PM	Tube furnace set to 0
12/13/2012	3:19:06 PM	Helium valve closed
12/13/2012	3:19:06 PM	H2 valve closed
12/13/2012	3:19:06 PM	BCl3 valve closed
12/13/2012	3:19:06 PM	PH3 valve closed
12/13/2012	3:19:06 PM	SiCl4 pre valve closed
12/13/2012	3:19:06 PM	SiCl4 post valve closed
12/13/2012	3:19:06 PM	Main Vac valve closed
12/13/2012	3:19:06 PM	Bubbler valve closed
12/13/2012	3:19:06 PM	Bypass valve opened
12/13/2012	3:19:06 PM	Helium MFC set to  0.000000
12/13/2012	3:19:06 PM	H2 MFC set to  0.000000
12/13/2012	3:19:06 PM	BCl3 MFC set to  0.000000
12/13/2012	3:19:06 PM	PH3 MFC set to  0.000000
12/13/2012	3:19:06 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:19:06 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:19:06 PM	Tube furnace set to 0
12/13/2012	3:19:36 PM	Helium valve closed
12/13/2012	3:19:36 PM	H2 valve closed
12/13/2012	3:19:36 PM	BCl3 valve closed
12/13/2012	3:19:36 PM	PH3 valve closed
12/13/2012	3:19:36 PM	SiCl4 pre valve closed
12/13/2012	3:19:36 PM	SiCl4 post valve closed
12/13/2012	3:19:36 PM	Bypass valve closed
12/13/2012	3:19:36 PM	Bubbler valve closed
12/13/2012	3:19:36 PM	Main Vac valve opened
12/13/2012	3:19:36 PM	Helium MFC set to  0.000000
12/13/2012	3:19:36 PM	H2 MFC set to  0.000000
12/13/2012	3:19:36 PM	BCl3 MFC set to  0.000000
12/13/2012	3:19:36 PM	PH3 MFC set to  0.000000
12/13/2012	3:19:36 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:19:36 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:19:36 PM	Tube furnace set to 0
12/13/2012	3:20:06 PM	H2 valve closed
12/13/2012	3:20:06 PM	BCl3 valve closed
12/13/2012	3:20:06 PM	PH3 valve closed
12/13/2012	3:20:06 PM	SiCl4 pre valve closed
12/13/2012	3:20:06 PM	SiCl4 post valve closed
12/13/2012	3:20:06 PM	Bypass valve closed
12/13/2012	3:20:06 PM	Bubbler valve closed
12/13/2012	3:20:06 PM	Helium valve opened
12/13/2012	3:20:06 PM	Main Vac valve opened
12/13/2012	3:20:06 PM	Helium MFC set to  20.000000
12/13/2012	3:20:06 PM	H2 MFC set to  0.000000
12/13/2012	3:20:06 PM	BCl3 MFC set to  0.000000
12/13/2012	3:20:06 PM	PH3 MFC set to  0.000000
12/13/2012	3:20:06 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:20:06 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:20:07 PM	Tube furnace set to 0
12/13/2012	3:20:37 PM	Helium valve closed
12/13/2012	3:20:37 PM	H2 valve closed
12/13/2012	3:20:37 PM	BCl3 valve closed
12/13/2012	3:20:37 PM	PH3 valve closed
12/13/2012	3:20:37 PM	SiCl4 pre valve closed
12/13/2012	3:20:37 PM	SiCl4 post valve closed
12/13/2012	3:20:37 PM	Bypass valve closed
12/13/2012	3:20:37 PM	Bubbler valve closed
12/13/2012	3:20:37 PM	Main Vac valve opened
12/13/2012	3:20:37 PM	Helium MFC set to  0.000000
12/13/2012	3:20:37 PM	H2 MFC set to  0.000000
12/13/2012	3:20:37 PM	BCl3 MFC set to  0.000000
12/13/2012	3:20:37 PM	PH3 MFC set to  0.000000
12/13/2012	3:20:37 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:20:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:20:37 PM	Tube furnace set to 0
12/13/2012	3:21:07 PM	H2 valve closed
12/13/2012	3:21:07 PM	BCl3 valve closed
12/13/2012	3:21:07 PM	PH3 valve closed
12/13/2012	3:21:07 PM	SiCl4 pre valve closed
12/13/2012	3:21:07 PM	SiCl4 post valve closed
12/13/2012	3:21:07 PM	Bypass valve closed
12/13/2012	3:21:07 PM	Bubbler valve closed
12/13/2012	3:21:07 PM	Helium valve opened
12/13/2012	3:21:07 PM	Main Vac valve opened
12/13/2012	3:21:07 PM	Helium MFC set to  20.000000
12/13/2012	3:21:07 PM	H2 MFC set to  0.000000
12/13/2012	3:21:07 PM	BCl3 MFC set to  0.000000
12/13/2012	3:21:07 PM	PH3 MFC set to  0.000000
12/13/2012	3:21:07 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:21:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:21:07 PM	Tube furnace set to 0
12/13/2012	3:21:37 PM	Helium valve closed
12/13/2012	3:21:37 PM	H2 valve closed
12/13/2012	3:21:37 PM	BCl3 valve closed
12/13/2012	3:21:37 PM	PH3 valve closed
12/13/2012	3:21:37 PM	SiCl4 pre valve closed
12/13/2012	3:21:37 PM	SiCl4 post valve closed
12/13/2012	3:21:37 PM	Bypass valve closed
12/13/2012	3:21:37 PM	Bubbler valve closed
12/13/2012	3:21:37 PM	Main Vac valve opened
12/13/2012	3:21:37 PM	Helium MFC set to  0.000000
12/13/2012	3:21:37 PM	H2 MFC set to  0.000000
12/13/2012	3:21:37 PM	BCl3 MFC set to  0.000000
12/13/2012	3:21:37 PM	PH3 MFC set to  0.000000
12/13/2012	3:21:37 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:21:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:21:37 PM	Tube furnace set to 0
12/13/2012	3:22:07 PM	H2 valve closed
12/13/2012	3:22:07 PM	BCl3 valve closed
12/13/2012	3:22:07 PM	PH3 valve closed
12/13/2012	3:22:07 PM	SiCl4 pre valve closed
12/13/2012	3:22:07 PM	SiCl4 post valve closed
12/13/2012	3:22:07 PM	Bypass valve closed
12/13/2012	3:22:07 PM	Bubbler valve closed
12/13/2012	3:22:07 PM	Helium valve opened
12/13/2012	3:22:07 PM	Main Vac valve opened
12/13/2012	3:22:07 PM	Helium MFC set to  20.000000
12/13/2012	3:22:07 PM	H2 MFC set to  0.000000
12/13/2012	3:22:07 PM	BCl3 MFC set to  0.000000
12/13/2012	3:22:07 PM	PH3 MFC set to  0.000000
12/13/2012	3:22:07 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:22:07 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:22:08 PM	Tube furnace set to 0
12/13/2012	3:22:38 PM	Helium valve closed
12/13/2012	3:22:38 PM	H2 valve closed
12/13/2012	3:22:38 PM	BCl3 valve closed
12/13/2012	3:22:38 PM	PH3 valve closed
12/13/2012	3:22:38 PM	SiCl4 pre valve closed
12/13/2012	3:22:38 PM	SiCl4 post valve closed
12/13/2012	3:22:38 PM	Bypass valve closed
12/13/2012	3:22:38 PM	Bubbler valve closed
12/13/2012	3:22:38 PM	Main Vac valve opened
12/13/2012	3:22:38 PM	Helium MFC set to  0.000000
12/13/2012	3:22:38 PM	H2 MFC set to  0.000000
12/13/2012	3:22:38 PM	BCl3 MFC set to  0.000000
12/13/2012	3:22:38 PM	PH3 MFC set to  0.000000
12/13/2012	3:22:38 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:22:38 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:22:38 PM	Tube furnace set to 0
12/13/2012	3:23:08 PM	H2 valve closed
12/13/2012	3:23:08 PM	BCl3 valve closed
12/13/2012	3:23:08 PM	PH3 valve closed
12/13/2012	3:23:08 PM	SiCl4 pre valve closed
12/13/2012	3:23:08 PM	SiCl4 post valve closed
12/13/2012	3:23:08 PM	Bypass valve closed
12/13/2012	3:23:08 PM	Bubbler valve closed
12/13/2012	3:23:08 PM	Helium valve opened
12/13/2012	3:23:08 PM	Main Vac valve opened
12/13/2012	3:23:08 PM	Helium MFC set to  20.000000
12/13/2012	3:23:08 PM	H2 MFC set to  0.000000
12/13/2012	3:23:08 PM	BCl3 MFC set to  0.000000
12/13/2012	3:23:08 PM	PH3 MFC set to  0.000000
12/13/2012	3:23:08 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:23:08 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:23:08 PM	Tube furnace set to 0
12/13/2012	3:23:38 PM	Helium valve closed
12/13/2012	3:23:38 PM	H2 valve closed
12/13/2012	3:23:38 PM	BCl3 valve closed
12/13/2012	3:23:38 PM	PH3 valve closed
12/13/2012	3:23:38 PM	SiCl4 pre valve closed
12/13/2012	3:23:38 PM	SiCl4 post valve closed
12/13/2012	3:23:38 PM	Bypass valve closed
12/13/2012	3:23:38 PM	Bubbler valve closed
12/13/2012	3:23:38 PM	Main Vac valve opened
12/13/2012	3:23:38 PM	Helium MFC set to  0.000000
12/13/2012	3:23:38 PM	H2 MFC set to  0.000000
12/13/2012	3:23:38 PM	BCl3 MFC set to  0.000000
12/13/2012	3:23:38 PM	PH3 MFC set to  0.000000
12/13/2012	3:23:38 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:23:38 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:23:38 PM	Tube furnace set to 0
12/13/2012	3:24:09 PM	H2 valve closed
12/13/2012	3:24:09 PM	BCl3 valve closed
12/13/2012	3:24:09 PM	PH3 valve closed
12/13/2012	3:24:09 PM	SiCl4 pre valve closed
12/13/2012	3:24:09 PM	SiCl4 post valve closed
12/13/2012	3:24:09 PM	Bypass valve closed
12/13/2012	3:24:09 PM	Bubbler valve closed
12/13/2012	3:24:09 PM	Helium valve opened
12/13/2012	3:24:09 PM	Main Vac valve opened
12/13/2012	3:24:09 PM	Helium MFC set to  20.000000
12/13/2012	3:24:09 PM	H2 MFC set to  0.000000
12/13/2012	3:24:09 PM	BCl3 MFC set to  0.000000
12/13/2012	3:24:09 PM	PH3 MFC set to  0.000000
12/13/2012	3:24:09 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:24:09 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:24:09 PM	Tube furnace set to 0
12/13/2012	3:24:39 PM	Helium valve closed
12/13/2012	3:24:39 PM	H2 valve closed
12/13/2012	3:24:39 PM	BCl3 valve closed
12/13/2012	3:24:39 PM	PH3 valve closed
12/13/2012	3:24:39 PM	SiCl4 pre valve closed
12/13/2012	3:24:39 PM	SiCl4 post valve closed
12/13/2012	3:24:39 PM	Bypass valve closed
12/13/2012	3:24:39 PM	Bubbler valve closed
12/13/2012	3:24:39 PM	Main Vac valve opened
12/13/2012	3:24:39 PM	Helium MFC set to  0.000000
12/13/2012	3:24:39 PM	H2 MFC set to  0.000000
12/13/2012	3:24:39 PM	BCl3 MFC set to  0.000000
12/13/2012	3:24:39 PM	PH3 MFC set to  0.000000
12/13/2012	3:24:39 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:24:39 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:24:39 PM	Tube furnace set to 0
12/13/2012	3:25:09 PM	H2 valve closed
12/13/2012	3:25:09 PM	BCl3 valve closed
12/13/2012	3:25:09 PM	PH3 valve closed
12/13/2012	3:25:09 PM	SiCl4 pre valve closed
12/13/2012	3:25:09 PM	SiCl4 post valve closed
12/13/2012	3:25:09 PM	Bypass valve closed
12/13/2012	3:25:09 PM	Bubbler valve closed
12/13/2012	3:25:09 PM	Helium valve opened
12/13/2012	3:25:09 PM	Main Vac valve opened
12/13/2012	3:25:09 PM	Helium MFC set to  20.000000
12/13/2012	3:25:09 PM	H2 MFC set to  0.000000
12/13/2012	3:25:09 PM	BCl3 MFC set to  0.000000
12/13/2012	3:25:09 PM	PH3 MFC set to  0.000000
12/13/2012	3:25:09 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:25:09 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:25:09 PM	Tube furnace set to 0
12/13/2012	3:25:39 PM	Helium valve closed
12/13/2012	3:25:39 PM	H2 valve closed
12/13/2012	3:25:39 PM	BCl3 valve closed
12/13/2012	3:25:39 PM	PH3 valve closed
12/13/2012	3:25:39 PM	SiCl4 pre valve closed
12/13/2012	3:25:39 PM	SiCl4 post valve closed
12/13/2012	3:25:39 PM	Bypass valve closed
12/13/2012	3:25:39 PM	Bubbler valve closed
12/13/2012	3:25:39 PM	Main Vac valve opened
12/13/2012	3:25:39 PM	Helium MFC set to  0.000000
12/13/2012	3:25:39 PM	H2 MFC set to  0.000000
12/13/2012	3:25:39 PM	BCl3 MFC set to  0.000000
12/13/2012	3:25:39 PM	PH3 MFC set to  0.000000
12/13/2012	3:25:39 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:25:39 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:25:40 PM	Tube furnace set to 0
12/13/2012	3:26:10 PM	H2 valve closed
12/13/2012	3:26:10 PM	BCl3 valve closed
12/13/2012	3:26:10 PM	PH3 valve closed
12/13/2012	3:26:10 PM	SiCl4 pre valve closed
12/13/2012	3:26:10 PM	SiCl4 post valve closed
12/13/2012	3:26:10 PM	Bypass valve closed
12/13/2012	3:26:10 PM	Bubbler valve closed
12/13/2012	3:26:10 PM	Helium valve opened
12/13/2012	3:26:10 PM	Main Vac valve opened
12/13/2012	3:26:10 PM	Helium MFC set to  20.000000
12/13/2012	3:26:10 PM	H2 MFC set to  0.000000
12/13/2012	3:26:10 PM	BCl3 MFC set to  0.000000
12/13/2012	3:26:10 PM	PH3 MFC set to  0.000000
12/13/2012	3:26:10 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:26:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:26:10 PM	Tube furnace set to 0
12/13/2012	3:26:40 PM	Helium valve closed
12/13/2012	3:26:40 PM	H2 valve closed
12/13/2012	3:26:40 PM	BCl3 valve closed
12/13/2012	3:26:40 PM	PH3 valve closed
12/13/2012	3:26:40 PM	SiCl4 pre valve closed
12/13/2012	3:26:40 PM	SiCl4 post valve closed
12/13/2012	3:26:40 PM	Bypass valve closed
12/13/2012	3:26:40 PM	Bubbler valve closed
12/13/2012	3:26:40 PM	Main Vac valve opened
12/13/2012	3:26:40 PM	Helium MFC set to  0.000000
12/13/2012	3:26:40 PM	H2 MFC set to  0.000000
12/13/2012	3:26:40 PM	BCl3 MFC set to  0.000000
12/13/2012	3:26:40 PM	PH3 MFC set to  0.000000
12/13/2012	3:26:40 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:26:40 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:26:40 PM	Tube furnace set to 0
12/13/2012	3:27:10 PM	H2 valve closed
12/13/2012	3:27:10 PM	BCl3 valve closed
12/13/2012	3:27:10 PM	PH3 valve closed
12/13/2012	3:27:10 PM	SiCl4 pre valve closed
12/13/2012	3:27:10 PM	SiCl4 post valve closed
12/13/2012	3:27:10 PM	Bypass valve closed
12/13/2012	3:27:10 PM	Bubbler valve closed
12/13/2012	3:27:10 PM	Helium valve opened
12/13/2012	3:27:10 PM	Main Vac valve opened
12/13/2012	3:27:10 PM	Helium MFC set to  20.000000
12/13/2012	3:27:10 PM	H2 MFC set to  0.000000
12/13/2012	3:27:10 PM	BCl3 MFC set to  0.000000
12/13/2012	3:27:10 PM	PH3 MFC set to  0.000000
12/13/2012	3:27:10 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:27:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:27:10 PM	Tube furnace set to 0
12/13/2012	3:27:40 PM	Helium valve closed
12/13/2012	3:27:40 PM	H2 valve closed
12/13/2012	3:27:40 PM	BCl3 valve closed
12/13/2012	3:27:40 PM	PH3 valve closed
12/13/2012	3:27:40 PM	SiCl4 pre valve closed
12/13/2012	3:27:40 PM	SiCl4 post valve closed
12/13/2012	3:27:40 PM	Bypass valve closed
12/13/2012	3:27:40 PM	Bubbler valve closed
12/13/2012	3:27:40 PM	Main Vac valve opened
12/13/2012	3:27:40 PM	Helium MFC set to  0.000000
12/13/2012	3:27:40 PM	H2 MFC set to  0.000000
12/13/2012	3:27:40 PM	BCl3 MFC set to  0.000000
12/13/2012	3:27:41 PM	PH3 MFC set to  0.000000
12/13/2012	3:27:41 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:27:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:27:41 PM	Tube furnace set to 0
12/13/2012	3:28:11 PM	H2 valve closed
12/13/2012	3:28:11 PM	BCl3 valve closed
12/13/2012	3:28:11 PM	PH3 valve closed
12/13/2012	3:28:11 PM	SiCl4 pre valve closed
12/13/2012	3:28:11 PM	SiCl4 post valve closed
12/13/2012	3:28:11 PM	Bypass valve closed
12/13/2012	3:28:11 PM	Bubbler valve closed
12/13/2012	3:28:11 PM	Helium valve opened
12/13/2012	3:28:11 PM	Main Vac valve opened
12/13/2012	3:28:11 PM	Helium MFC set to  20.000000
12/13/2012	3:28:11 PM	H2 MFC set to  0.000000
12/13/2012	3:28:11 PM	BCl3 MFC set to  0.000000
12/13/2012	3:28:11 PM	PH3 MFC set to  0.000000
12/13/2012	3:28:11 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:28:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:28:11 PM	Tube furnace set to 0
12/13/2012	3:28:41 PM	Helium valve closed
12/13/2012	3:28:41 PM	H2 valve closed
12/13/2012	3:28:41 PM	BCl3 valve closed
12/13/2012	3:28:41 PM	PH3 valve closed
12/13/2012	3:28:41 PM	SiCl4 pre valve closed
12/13/2012	3:28:41 PM	SiCl4 post valve closed
12/13/2012	3:28:41 PM	Bypass valve closed
12/13/2012	3:28:41 PM	Bubbler valve closed
12/13/2012	3:28:41 PM	Main Vac valve opened
12/13/2012	3:28:41 PM	Helium MFC set to  0.000000
12/13/2012	3:28:41 PM	H2 MFC set to  0.000000
12/13/2012	3:28:41 PM	BCl3 MFC set to  0.000000
12/13/2012	3:28:41 PM	PH3 MFC set to  0.000000
12/13/2012	3:28:41 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:28:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:28:41 PM	Tube furnace set to 0
12/13/2012	3:29:11 PM	H2 valve closed
12/13/2012	3:29:11 PM	BCl3 valve closed
12/13/2012	3:29:11 PM	PH3 valve closed
12/13/2012	3:29:11 PM	SiCl4 pre valve closed
12/13/2012	3:29:11 PM	SiCl4 post valve closed
12/13/2012	3:29:11 PM	Bypass valve closed
12/13/2012	3:29:11 PM	Bubbler valve closed
12/13/2012	3:29:11 PM	Helium valve opened
12/13/2012	3:29:11 PM	Main Vac valve opened
12/13/2012	3:29:11 PM	Helium MFC set to  20.000000
12/13/2012	3:29:11 PM	H2 MFC set to  0.000000
12/13/2012	3:29:11 PM	BCl3 MFC set to  0.000000
12/13/2012	3:29:11 PM	PH3 MFC set to  0.000000
12/13/2012	3:29:11 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:29:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:29:11 PM	Tube furnace set to 0
12/13/2012	3:29:41 PM	Helium valve closed
12/13/2012	3:29:41 PM	H2 valve closed
12/13/2012	3:29:41 PM	BCl3 valve closed
12/13/2012	3:29:41 PM	PH3 valve closed
12/13/2012	3:29:41 PM	SiCl4 pre valve closed
12/13/2012	3:29:41 PM	SiCl4 post valve closed
12/13/2012	3:29:41 PM	Bypass valve closed
12/13/2012	3:29:41 PM	Bubbler valve closed
12/13/2012	3:29:41 PM	Main Vac valve opened
12/13/2012	3:29:41 PM	Helium MFC set to  0.000000
12/13/2012	3:29:41 PM	H2 MFC set to  0.000000
12/13/2012	3:29:41 PM	BCl3 MFC set to  0.000000
12/13/2012	3:29:42 PM	PH3 MFC set to  0.000000
12/13/2012	3:29:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:29:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:29:42 PM	Tube furnace set to 0
12/13/2012	3:29:43 PM	Run finished at 3:29 PM
12/13/2012	3:29:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	3:30:43 PM	Main Vac valve closed
12/13/2012	3:31:19 PM	Main Vac valve opened
12/13/2012	3:31:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	3:32:08 PM	Recipe started at 3:32 PM
12/13/2012	3:32:08 PM	Helium valve closed
12/13/2012	3:32:08 PM	H2 valve closed
12/13/2012	3:32:08 PM	BCl3 valve closed
12/13/2012	3:32:08 PM	PH3 valve closed
12/13/2012	3:32:08 PM	SiCl4 pre valve closed
12/13/2012	3:32:08 PM	SiCl4 post valve closed
12/13/2012	3:32:08 PM	Main Vac valve closed
12/13/2012	3:32:08 PM	Bubbler valve closed
12/13/2012	3:32:08 PM	Bypass valve opened
12/13/2012	3:32:08 PM	Helium MFC set to  0.000000
12/13/2012	3:32:08 PM	H2 MFC set to  0.000000
12/13/2012	3:32:08 PM	BCl3 MFC set to  0.000000
12/13/2012	3:32:08 PM	PH3 MFC set to  0.000000
12/13/2012	3:32:08 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:32:08 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:32:08 PM	Tube furnace set to 0
12/13/2012	3:32:08 PM	Helium valve closed
12/13/2012	3:32:08 PM	H2 valve closed
12/13/2012	3:32:08 PM	BCl3 valve closed
12/13/2012	3:32:08 PM	PH3 valve closed
12/13/2012	3:32:08 PM	SiCl4 pre valve closed
12/13/2012	3:32:08 PM	SiCl4 post valve closed
12/13/2012	3:32:08 PM	Main Vac valve closed
12/13/2012	3:32:08 PM	Bubbler valve closed
12/13/2012	3:32:08 PM	Bypass valve opened
12/13/2012	3:32:08 PM	Helium MFC set to  0.000000
12/13/2012	3:32:08 PM	H2 MFC set to  0.000000
12/13/2012	3:32:08 PM	BCl3 MFC set to  0.000000
12/13/2012	3:32:08 PM	PH3 MFC set to  0.000000
12/13/2012	3:32:08 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:32:08 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:32:08 PM	Tube furnace set to 0
12/13/2012	3:32:38 PM	Helium valve closed
12/13/2012	3:32:38 PM	H2 valve closed
12/13/2012	3:32:38 PM	BCl3 valve closed
12/13/2012	3:32:38 PM	PH3 valve closed
12/13/2012	3:32:38 PM	SiCl4 pre valve closed
12/13/2012	3:32:38 PM	SiCl4 post valve closed
12/13/2012	3:32:38 PM	Bypass valve closed
12/13/2012	3:32:38 PM	Bubbler valve closed
12/13/2012	3:32:38 PM	Main Vac valve opened
12/13/2012	3:32:38 PM	Helium MFC set to  0.000000
12/13/2012	3:32:38 PM	H2 MFC set to  0.000000
12/13/2012	3:32:38 PM	BCl3 MFC set to  0.000000
12/13/2012	3:32:38 PM	PH3 MFC set to  0.000000
12/13/2012	3:32:38 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:32:38 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:32:39 PM	Tube furnace set to 0
12/13/2012	3:33:09 PM	H2 valve closed
12/13/2012	3:33:09 PM	BCl3 valve closed
12/13/2012	3:33:09 PM	PH3 valve closed
12/13/2012	3:33:09 PM	SiCl4 pre valve closed
12/13/2012	3:33:09 PM	SiCl4 post valve closed
12/13/2012	3:33:09 PM	Bypass valve closed
12/13/2012	3:33:09 PM	Bubbler valve closed
12/13/2012	3:33:09 PM	Helium valve opened
12/13/2012	3:33:09 PM	Main Vac valve opened
12/13/2012	3:33:09 PM	Helium MFC set to  20.000000
12/13/2012	3:33:09 PM	H2 MFC set to  0.000000
12/13/2012	3:33:09 PM	BCl3 MFC set to  0.000000
12/13/2012	3:33:09 PM	PH3 MFC set to  0.000000
12/13/2012	3:33:09 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:33:09 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:33:09 PM	Tube furnace set to 0
12/13/2012	3:33:39 PM	Helium valve closed
12/13/2012	3:33:39 PM	H2 valve closed
12/13/2012	3:33:39 PM	BCl3 valve closed
12/13/2012	3:33:39 PM	PH3 valve closed
12/13/2012	3:33:39 PM	SiCl4 pre valve closed
12/13/2012	3:33:39 PM	SiCl4 post valve closed
12/13/2012	3:33:39 PM	Bypass valve closed
12/13/2012	3:33:39 PM	Bubbler valve closed
12/13/2012	3:33:39 PM	Main Vac valve opened
12/13/2012	3:33:39 PM	Helium MFC set to  0.000000
12/13/2012	3:33:39 PM	H2 MFC set to  0.000000
12/13/2012	3:33:39 PM	BCl3 MFC set to  0.000000
12/13/2012	3:33:39 PM	PH3 MFC set to  0.000000
12/13/2012	3:33:39 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:33:39 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:33:39 PM	Tube furnace set to 0
12/13/2012	3:34:09 PM	H2 valve closed
12/13/2012	3:34:09 PM	BCl3 valve closed
12/13/2012	3:34:09 PM	PH3 valve closed
12/13/2012	3:34:09 PM	SiCl4 pre valve closed
12/13/2012	3:34:09 PM	SiCl4 post valve closed
12/13/2012	3:34:09 PM	Bypass valve closed
12/13/2012	3:34:09 PM	Bubbler valve closed
12/13/2012	3:34:09 PM	Helium valve opened
12/13/2012	3:34:09 PM	Main Vac valve opened
12/13/2012	3:34:09 PM	Helium MFC set to  20.000000
12/13/2012	3:34:09 PM	H2 MFC set to  0.000000
12/13/2012	3:34:09 PM	BCl3 MFC set to  0.000000
12/13/2012	3:34:09 PM	PH3 MFC set to  0.000000
12/13/2012	3:34:09 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:34:09 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:34:09 PM	Tube furnace set to 0
12/13/2012	3:34:39 PM	Helium valve closed
12/13/2012	3:34:39 PM	H2 valve closed
12/13/2012	3:34:39 PM	BCl3 valve closed
12/13/2012	3:34:39 PM	PH3 valve closed
12/13/2012	3:34:39 PM	SiCl4 pre valve closed
12/13/2012	3:34:39 PM	SiCl4 post valve closed
12/13/2012	3:34:39 PM	Bypass valve closed
12/13/2012	3:34:39 PM	Bubbler valve closed
12/13/2012	3:34:39 PM	Main Vac valve opened
12/13/2012	3:34:39 PM	Helium MFC set to  0.000000
12/13/2012	3:34:39 PM	H2 MFC set to  0.000000
12/13/2012	3:34:39 PM	BCl3 MFC set to  0.000000
12/13/2012	3:34:39 PM	PH3 MFC set to  0.000000
12/13/2012	3:34:39 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:34:39 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:34:40 PM	Tube furnace set to 0
12/13/2012	3:35:10 PM	H2 valve closed
12/13/2012	3:35:10 PM	BCl3 valve closed
12/13/2012	3:35:10 PM	PH3 valve closed
12/13/2012	3:35:10 PM	SiCl4 pre valve closed
12/13/2012	3:35:10 PM	SiCl4 post valve closed
12/13/2012	3:35:10 PM	Bypass valve closed
12/13/2012	3:35:10 PM	Bubbler valve closed
12/13/2012	3:35:10 PM	Helium valve opened
12/13/2012	3:35:10 PM	Main Vac valve opened
12/13/2012	3:35:10 PM	Helium MFC set to  20.000000
12/13/2012	3:35:10 PM	H2 MFC set to  0.000000
12/13/2012	3:35:10 PM	BCl3 MFC set to  0.000000
12/13/2012	3:35:10 PM	PH3 MFC set to  0.000000
12/13/2012	3:35:10 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:35:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:35:10 PM	Tube furnace set to 0
12/13/2012	3:35:40 PM	Helium valve closed
12/13/2012	3:35:40 PM	H2 valve closed
12/13/2012	3:35:40 PM	BCl3 valve closed
12/13/2012	3:35:40 PM	PH3 valve closed
12/13/2012	3:35:40 PM	SiCl4 pre valve closed
12/13/2012	3:35:40 PM	SiCl4 post valve closed
12/13/2012	3:35:40 PM	Bypass valve closed
12/13/2012	3:35:40 PM	Bubbler valve closed
12/13/2012	3:35:40 PM	Main Vac valve opened
12/13/2012	3:35:40 PM	Helium MFC set to  0.000000
12/13/2012	3:35:40 PM	H2 MFC set to  0.000000
12/13/2012	3:35:40 PM	BCl3 MFC set to  0.000000
12/13/2012	3:35:40 PM	PH3 MFC set to  0.000000
12/13/2012	3:35:40 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:35:40 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:35:40 PM	Tube furnace set to 0
12/13/2012	3:36:10 PM	H2 valve closed
12/13/2012	3:36:10 PM	BCl3 valve closed
12/13/2012	3:36:10 PM	PH3 valve closed
12/13/2012	3:36:10 PM	SiCl4 pre valve closed
12/13/2012	3:36:10 PM	SiCl4 post valve closed
12/13/2012	3:36:10 PM	Bypass valve closed
12/13/2012	3:36:10 PM	Bubbler valve closed
12/13/2012	3:36:10 PM	Helium valve opened
12/13/2012	3:36:10 PM	Main Vac valve opened
12/13/2012	3:36:10 PM	Helium MFC set to  20.000000
12/13/2012	3:36:10 PM	H2 MFC set to  0.000000
12/13/2012	3:36:10 PM	BCl3 MFC set to  0.000000
12/13/2012	3:36:10 PM	PH3 MFC set to  0.000000
12/13/2012	3:36:10 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:36:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:36:10 PM	Tube furnace set to 0
12/13/2012	3:36:40 PM	Helium valve closed
12/13/2012	3:36:40 PM	H2 valve closed
12/13/2012	3:36:40 PM	BCl3 valve closed
12/13/2012	3:36:40 PM	PH3 valve closed
12/13/2012	3:36:40 PM	SiCl4 pre valve closed
12/13/2012	3:36:40 PM	SiCl4 post valve closed
12/13/2012	3:36:40 PM	Bypass valve closed
12/13/2012	3:36:40 PM	Bubbler valve closed
12/13/2012	3:36:40 PM	Main Vac valve opened
12/13/2012	3:36:40 PM	Helium MFC set to  0.000000
12/13/2012	3:36:40 PM	H2 MFC set to  0.000000
12/13/2012	3:36:40 PM	BCl3 MFC set to  0.000000
12/13/2012	3:36:40 PM	PH3 MFC set to  0.000000
12/13/2012	3:36:40 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:36:40 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:36:41 PM	Tube furnace set to 0
12/13/2012	3:37:11 PM	H2 valve closed
12/13/2012	3:37:11 PM	BCl3 valve closed
12/13/2012	3:37:11 PM	PH3 valve closed
12/13/2012	3:37:11 PM	SiCl4 pre valve closed
12/13/2012	3:37:11 PM	SiCl4 post valve closed
12/13/2012	3:37:11 PM	Bypass valve closed
12/13/2012	3:37:11 PM	Bubbler valve closed
12/13/2012	3:37:11 PM	Helium valve opened
12/13/2012	3:37:11 PM	Main Vac valve opened
12/13/2012	3:37:11 PM	Helium MFC set to  20.000000
12/13/2012	3:37:11 PM	H2 MFC set to  0.000000
12/13/2012	3:37:11 PM	BCl3 MFC set to  0.000000
12/13/2012	3:37:11 PM	PH3 MFC set to  0.000000
12/13/2012	3:37:11 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:37:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:37:11 PM	Tube furnace set to 0
12/13/2012	3:37:41 PM	Helium valve closed
12/13/2012	3:37:41 PM	H2 valve closed
12/13/2012	3:37:41 PM	BCl3 valve closed
12/13/2012	3:37:41 PM	PH3 valve closed
12/13/2012	3:37:41 PM	SiCl4 pre valve closed
12/13/2012	3:37:41 PM	SiCl4 post valve closed
12/13/2012	3:37:41 PM	Bypass valve closed
12/13/2012	3:37:41 PM	Bubbler valve closed
12/13/2012	3:37:41 PM	Main Vac valve opened
12/13/2012	3:37:41 PM	Helium MFC set to  0.000000
12/13/2012	3:37:41 PM	H2 MFC set to  0.000000
12/13/2012	3:37:41 PM	BCl3 MFC set to  0.000000
12/13/2012	3:37:41 PM	PH3 MFC set to  0.000000
12/13/2012	3:37:41 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:37:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:37:41 PM	Tube furnace set to 0
12/13/2012	3:38:11 PM	H2 valve closed
12/13/2012	3:38:11 PM	BCl3 valve closed
12/13/2012	3:38:11 PM	PH3 valve closed
12/13/2012	3:38:11 PM	SiCl4 pre valve closed
12/13/2012	3:38:11 PM	SiCl4 post valve closed
12/13/2012	3:38:11 PM	Bypass valve closed
12/13/2012	3:38:11 PM	Bubbler valve closed
12/13/2012	3:38:11 PM	Helium valve opened
12/13/2012	3:38:11 PM	Main Vac valve opened
12/13/2012	3:38:11 PM	Helium MFC set to  20.000000
12/13/2012	3:38:11 PM	H2 MFC set to  0.000000
12/13/2012	3:38:11 PM	BCl3 MFC set to  0.000000
12/13/2012	3:38:11 PM	PH3 MFC set to  0.000000
12/13/2012	3:38:11 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:38:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:38:11 PM	Tube furnace set to 0
12/13/2012	3:38:41 PM	Helium valve closed
12/13/2012	3:38:41 PM	H2 valve closed
12/13/2012	3:38:41 PM	BCl3 valve closed
12/13/2012	3:38:41 PM	PH3 valve closed
12/13/2012	3:38:41 PM	SiCl4 pre valve closed
12/13/2012	3:38:41 PM	SiCl4 post valve closed
12/13/2012	3:38:42 PM	Bypass valve closed
12/13/2012	3:38:42 PM	Bubbler valve closed
12/13/2012	3:38:42 PM	Main Vac valve opened
12/13/2012	3:38:42 PM	Helium MFC set to  0.000000
12/13/2012	3:38:42 PM	H2 MFC set to  0.000000
12/13/2012	3:38:42 PM	BCl3 MFC set to  0.000000
12/13/2012	3:38:42 PM	PH3 MFC set to  0.000000
12/13/2012	3:38:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:38:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:38:42 PM	Tube furnace set to 0
12/13/2012	3:39:11 PM	H2 valve closed
12/13/2012	3:39:12 PM	BCl3 valve closed
12/13/2012	3:39:12 PM	PH3 valve closed
12/13/2012	3:39:12 PM	SiCl4 pre valve closed
12/13/2012	3:39:12 PM	SiCl4 post valve closed
12/13/2012	3:39:12 PM	Bypass valve closed
12/13/2012	3:39:12 PM	Bubbler valve closed
12/13/2012	3:39:12 PM	Helium valve opened
12/13/2012	3:39:12 PM	Main Vac valve opened
12/13/2012	3:39:12 PM	Helium MFC set to  20.000000
12/13/2012	3:39:12 PM	H2 MFC set to  0.000000
12/13/2012	3:39:12 PM	BCl3 MFC set to  0.000000
12/13/2012	3:39:12 PM	PH3 MFC set to  0.000000
12/13/2012	3:39:12 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:39:12 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:39:12 PM	Tube furnace set to 0
12/13/2012	3:39:42 PM	Helium valve closed
12/13/2012	3:39:42 PM	H2 valve closed
12/13/2012	3:39:42 PM	BCl3 valve closed
12/13/2012	3:39:42 PM	PH3 valve closed
12/13/2012	3:39:42 PM	SiCl4 pre valve closed
12/13/2012	3:39:42 PM	SiCl4 post valve closed
12/13/2012	3:39:42 PM	Bypass valve closed
12/13/2012	3:39:42 PM	Bubbler valve closed
12/13/2012	3:39:42 PM	Main Vac valve opened
12/13/2012	3:39:42 PM	Helium MFC set to  0.000000
12/13/2012	3:39:42 PM	H2 MFC set to  0.000000
12/13/2012	3:39:42 PM	BCl3 MFC set to  0.000000
12/13/2012	3:39:42 PM	PH3 MFC set to  0.000000
12/13/2012	3:39:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:39:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:39:42 PM	Tube furnace set to 0
12/13/2012	3:40:12 PM	H2 valve closed
12/13/2012	3:40:12 PM	BCl3 valve closed
12/13/2012	3:40:12 PM	PH3 valve closed
12/13/2012	3:40:12 PM	SiCl4 pre valve closed
12/13/2012	3:40:12 PM	SiCl4 post valve closed
12/13/2012	3:40:12 PM	Bypass valve closed
12/13/2012	3:40:12 PM	Bubbler valve closed
12/13/2012	3:40:12 PM	Helium valve opened
12/13/2012	3:40:12 PM	Main Vac valve opened
12/13/2012	3:40:12 PM	Helium MFC set to  20.000000
12/13/2012	3:40:12 PM	H2 MFC set to  0.000000
12/13/2012	3:40:12 PM	BCl3 MFC set to  0.000000
12/13/2012	3:40:12 PM	PH3 MFC set to  0.000000
12/13/2012	3:40:12 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:40:12 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:40:12 PM	Tube furnace set to 0
12/13/2012	3:40:42 PM	Helium valve closed
12/13/2012	3:40:42 PM	H2 valve closed
12/13/2012	3:40:42 PM	BCl3 valve closed
12/13/2012	3:40:42 PM	PH3 valve closed
12/13/2012	3:40:42 PM	SiCl4 pre valve closed
12/13/2012	3:40:42 PM	SiCl4 post valve closed
12/13/2012	3:40:42 PM	Bypass valve closed
12/13/2012	3:40:42 PM	Bubbler valve closed
12/13/2012	3:40:42 PM	Main Vac valve opened
12/13/2012	3:40:42 PM	Helium MFC set to  0.000000
12/13/2012	3:40:42 PM	H2 MFC set to  0.000000
12/13/2012	3:40:42 PM	BCl3 MFC set to  0.000000
12/13/2012	3:40:42 PM	PH3 MFC set to  0.000000
12/13/2012	3:40:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:40:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:40:43 PM	Tube furnace set to 0
12/13/2012	3:41:13 PM	H2 valve closed
12/13/2012	3:41:13 PM	BCl3 valve closed
12/13/2012	3:41:13 PM	PH3 valve closed
12/13/2012	3:41:13 PM	SiCl4 pre valve closed
12/13/2012	3:41:13 PM	SiCl4 post valve closed
12/13/2012	3:41:13 PM	Bypass valve closed
12/13/2012	3:41:13 PM	Bubbler valve closed
12/13/2012	3:41:13 PM	Helium valve opened
12/13/2012	3:41:13 PM	Main Vac valve opened
12/13/2012	3:41:13 PM	Helium MFC set to  20.000000
12/13/2012	3:41:13 PM	H2 MFC set to  0.000000
12/13/2012	3:41:13 PM	BCl3 MFC set to  0.000000
12/13/2012	3:41:13 PM	PH3 MFC set to  0.000000
12/13/2012	3:41:13 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:41:13 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:41:13 PM	Tube furnace set to 0
12/13/2012	3:41:43 PM	Helium valve closed
12/13/2012	3:41:43 PM	H2 valve closed
12/13/2012	3:41:43 PM	BCl3 valve closed
12/13/2012	3:41:43 PM	PH3 valve closed
12/13/2012	3:41:43 PM	SiCl4 pre valve closed
12/13/2012	3:41:43 PM	SiCl4 post valve closed
12/13/2012	3:41:43 PM	Bypass valve closed
12/13/2012	3:41:43 PM	Bubbler valve closed
12/13/2012	3:41:43 PM	Main Vac valve opened
12/13/2012	3:41:43 PM	Helium MFC set to  0.000000
12/13/2012	3:41:43 PM	H2 MFC set to  0.000000
12/13/2012	3:41:43 PM	BCl3 MFC set to  0.000000
12/13/2012	3:41:43 PM	PH3 MFC set to  0.000000
12/13/2012	3:41:43 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:41:43 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:41:43 PM	Tube furnace set to 0
12/13/2012	3:42:13 PM	H2 valve closed
12/13/2012	3:42:13 PM	BCl3 valve closed
12/13/2012	3:42:13 PM	PH3 valve closed
12/13/2012	3:42:13 PM	SiCl4 pre valve closed
12/13/2012	3:42:13 PM	SiCl4 post valve closed
12/13/2012	3:42:13 PM	Bypass valve closed
12/13/2012	3:42:13 PM	Bubbler valve closed
12/13/2012	3:42:13 PM	Helium valve opened
12/13/2012	3:42:13 PM	Main Vac valve opened
12/13/2012	3:42:13 PM	Helium MFC set to  20.000000
12/13/2012	3:42:13 PM	H2 MFC set to  0.000000
12/13/2012	3:42:13 PM	BCl3 MFC set to  0.000000
12/13/2012	3:42:13 PM	PH3 MFC set to  0.000000
12/13/2012	3:42:13 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:42:13 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:42:13 PM	Tube furnace set to 0
12/13/2012	3:42:43 PM	Helium valve closed
12/13/2012	3:42:43 PM	H2 valve closed
12/13/2012	3:42:43 PM	BCl3 valve closed
12/13/2012	3:42:43 PM	PH3 valve closed
12/13/2012	3:42:43 PM	SiCl4 pre valve closed
12/13/2012	3:42:43 PM	SiCl4 post valve closed
12/13/2012	3:42:43 PM	Bypass valve closed
12/13/2012	3:42:43 PM	Bubbler valve closed
12/13/2012	3:42:43 PM	Main Vac valve opened
12/13/2012	3:42:43 PM	Helium MFC set to  0.000000
12/13/2012	3:42:43 PM	H2 MFC set to  0.000000
12/13/2012	3:42:43 PM	BCl3 MFC set to  0.000000
12/13/2012	3:42:43 PM	PH3 MFC set to  0.000000
12/13/2012	3:42:43 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:42:43 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:42:44 PM	Tube furnace set to 0
12/13/2012	3:42:45 PM	Run finished at 3:42 PM
12/13/2012	3:42:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/13/2012	3:43:28 PM	Main Vac valve closed
12/13/2012	3:44:01 PM	Main Vac valve opened
12/13/2012	3:44:32 PM	Recipe started at 3:44 PM
12/13/2012	3:44:32 PM	Helium valve closed
12/13/2012	3:44:32 PM	H2 valve closed
12/13/2012	3:44:32 PM	BCl3 valve closed
12/13/2012	3:44:32 PM	PH3 valve closed
12/13/2012	3:44:32 PM	SiCl4 pre valve closed
12/13/2012	3:44:32 PM	SiCl4 post valve closed
12/13/2012	3:44:32 PM	Main Vac valve closed
12/13/2012	3:44:32 PM	Bypass valve closed
12/13/2012	3:44:32 PM	Bubbler valve closed
12/13/2012	3:44:32 PM	Helium MFC set to  0.000000
12/13/2012	3:44:32 PM	H2 MFC set to  0.000000
12/13/2012	3:44:32 PM	BCl3 MFC set to  0.000000
12/13/2012	3:44:32 PM	PH3 MFC set to  0.000000
12/13/2012	3:44:32 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:44:32 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:44:32 PM	Tube furnace set to 0
12/13/2012	3:44:35 PM	Helium valve closed
12/13/2012	3:44:35 PM	BCl3 valve closed
12/13/2012	3:44:35 PM	PH3 valve closed
12/13/2012	3:44:35 PM	SiCl4 pre valve closed
12/13/2012	3:44:35 PM	SiCl4 post valve closed
12/13/2012	3:44:35 PM	Main Vac valve closed
12/13/2012	3:44:35 PM	Bypass valve closed
12/13/2012	3:44:35 PM	Bubbler valve closed
12/13/2012	3:44:35 PM	H2 valve opened
12/13/2012	3:44:35 PM	Helium MFC set to  0.000000
12/13/2012	3:44:35 PM	H2 MFC set to  500.000000
12/13/2012	3:44:35 PM	BCl3 MFC set to  0.000000
12/13/2012	3:44:35 PM	PH3 MFC set to  0.000000
12/13/2012	3:44:35 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:44:35 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:44:35 PM	Tube furnace set to 0
12/13/2012	3:45:50 PM	Helium valve closed
12/13/2012	3:45:50 PM	BCl3 valve closed
12/13/2012	3:45:50 PM	PH3 valve closed
12/13/2012	3:45:50 PM	SiCl4 pre valve closed
12/13/2012	3:45:50 PM	SiCl4 post valve closed
12/13/2012	3:45:50 PM	Main Vac valve closed
12/13/2012	3:45:50 PM	Bypass valve closed
12/13/2012	3:45:50 PM	H2 valve opened
12/13/2012	3:45:50 PM	Bubbler valve opened
12/13/2012	3:45:50 PM	Helium MFC set to  0.000000
12/13/2012	3:45:50 PM	H2 MFC set to  500.000000
12/13/2012	3:45:50 PM	BCl3 MFC set to  0.000000
12/13/2012	3:45:50 PM	PH3 MFC set to  0.000000
12/13/2012	3:45:50 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:45:50 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:45:50 PM	Tube furnace set to 0
12/13/2012	3:45:51 PM	Helium valve closed
12/13/2012	3:45:51 PM	BCl3 valve closed
12/13/2012	3:45:51 PM	PH3 valve closed
12/13/2012	3:45:51 PM	SiCl4 pre valve closed
12/13/2012	3:45:51 PM	SiCl4 post valve closed
12/13/2012	3:45:51 PM	Main Vac valve closed
12/13/2012	3:45:51 PM	Bypass valve closed
12/13/2012	3:45:51 PM	H2 valve opened
12/13/2012	3:45:51 PM	Bubbler valve opened
12/13/2012	3:45:51 PM	Helium MFC set to  0.000000
12/13/2012	3:45:51 PM	H2 MFC set to  500.000000
12/13/2012	3:45:51 PM	BCl3 MFC set to  0.000000
12/13/2012	3:45:51 PM	PH3 MFC set to  0.000000
12/13/2012	3:45:51 PM	SiCl4 MFC set to  0.000000
12/13/2012	3:45:51 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	3:45:52 PM	Tube furnace set to 1000
12/13/2012	4:05:52 PM	Helium valve closed
12/13/2012	4:05:52 PM	BCl3 valve closed
12/13/2012	4:05:52 PM	PH3 valve closed
12/13/2012	4:05:52 PM	Main Vac valve closed
12/13/2012	4:05:52 PM	Bypass valve closed
12/13/2012	4:05:52 PM	H2 valve opened
12/13/2012	4:05:52 PM	SiCl4 pre valve opened
12/13/2012	4:05:52 PM	SiCl4 post valve opened
12/13/2012	4:05:52 PM	Bubbler valve opened
12/13/2012	4:05:52 PM	Helium MFC set to  0.000000
12/13/2012	4:05:52 PM	H2 MFC set to  500.000000
12/13/2012	4:05:52 PM	BCl3 MFC set to  0.000000
12/13/2012	4:05:52 PM	PH3 MFC set to  0.000000
12/13/2012	4:05:52 PM	SiCl4 MFC set to  50.000000
12/13/2012	4:05:52 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:05:52 PM	Tube furnace set to 1000
12/13/2012	4:25:52 PM	Helium valve closed
12/13/2012	4:25:52 PM	BCl3 valve closed
12/13/2012	4:25:52 PM	SiCl4 pre valve closed
12/13/2012	4:25:52 PM	SiCl4 post valve closed
12/13/2012	4:25:52 PM	Main Vac valve closed
12/13/2012	4:25:52 PM	Bypass valve closed
12/13/2012	4:25:52 PM	H2 valve opened
12/13/2012	4:25:52 PM	PH3 valve opened
12/13/2012	4:25:52 PM	Bubbler valve opened
12/13/2012	4:25:52 PM	Helium MFC set to  0.000000
12/13/2012	4:25:52 PM	H2 MFC set to  500.000000
12/13/2012	4:25:52 PM	BCl3 MFC set to  0.000000
12/13/2012	4:25:52 PM	PH3 MFC set to  20.000000
12/13/2012	4:25:52 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:25:52 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:25:52 PM	Tube furnace set to 1000
12/13/2012	4:41:52 PM	Helium valve closed
12/13/2012	4:41:52 PM	BCl3 valve closed
12/13/2012	4:41:52 PM	PH3 valve closed
12/13/2012	4:41:52 PM	SiCl4 pre valve closed
12/13/2012	4:41:52 PM	SiCl4 post valve closed
12/13/2012	4:41:52 PM	Main Vac valve closed
12/13/2012	4:41:52 PM	Bypass valve closed
12/13/2012	4:41:52 PM	H2 valve opened
12/13/2012	4:41:52 PM	Bubbler valve opened
12/13/2012	4:41:52 PM	Helium MFC set to  0.000000
12/13/2012	4:41:52 PM	H2 MFC set to  500.000000
12/13/2012	4:41:52 PM	BCl3 MFC set to  0.000000
12/13/2012	4:41:52 PM	PH3 MFC set to  0.000000
12/13/2012	4:41:52 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:41:52 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:41:52 PM	Tube furnace set to 950
12/13/2012	4:43:52 PM	Helium valve closed
12/13/2012	4:43:52 PM	BCl3 valve closed
12/13/2012	4:43:52 PM	PH3 valve closed
12/13/2012	4:43:52 PM	SiCl4 pre valve closed
12/13/2012	4:43:52 PM	SiCl4 post valve closed
12/13/2012	4:43:52 PM	Main Vac valve closed
12/13/2012	4:43:52 PM	Bypass valve closed
12/13/2012	4:43:52 PM	H2 valve opened
12/13/2012	4:43:52 PM	Bubbler valve opened
12/13/2012	4:43:52 PM	Helium MFC set to  0.000000
12/13/2012	4:43:52 PM	H2 MFC set to  500.000000
12/13/2012	4:43:52 PM	BCl3 MFC set to  0.000000
12/13/2012	4:43:52 PM	PH3 MFC set to  0.000000
12/13/2012	4:43:52 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:43:52 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:43:53 PM	Tube furnace set to 900
12/13/2012	4:45:53 PM	Helium valve closed
12/13/2012	4:45:53 PM	BCl3 valve closed
12/13/2012	4:45:53 PM	PH3 valve closed
12/13/2012	4:45:53 PM	SiCl4 pre valve closed
12/13/2012	4:45:53 PM	SiCl4 post valve closed
12/13/2012	4:45:53 PM	Main Vac valve closed
12/13/2012	4:45:53 PM	Bypass valve closed
12/13/2012	4:45:53 PM	H2 valve opened
12/13/2012	4:45:53 PM	Bubbler valve opened
12/13/2012	4:45:53 PM	Helium MFC set to  0.000000
12/13/2012	4:45:53 PM	H2 MFC set to  500.000000
12/13/2012	4:45:53 PM	BCl3 MFC set to  0.000000
12/13/2012	4:45:53 PM	PH3 MFC set to  0.000000
12/13/2012	4:45:53 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:45:53 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:45:53 PM	Tube furnace set to 850
12/13/2012	4:47:53 PM	H2 valve closed
12/13/2012	4:47:53 PM	BCl3 valve closed
12/13/2012	4:47:53 PM	PH3 valve closed
12/13/2012	4:47:53 PM	SiCl4 pre valve closed
12/13/2012	4:47:53 PM	SiCl4 post valve closed
12/13/2012	4:47:53 PM	Main Vac valve closed
12/13/2012	4:47:53 PM	Bypass valve closed
12/13/2012	4:47:53 PM	Helium valve opened
12/13/2012	4:47:53 PM	Bubbler valve opened
12/13/2012	4:47:53 PM	Helium MFC set to  500.000000
12/13/2012	4:47:53 PM	H2 MFC set to  0.000000
12/13/2012	4:47:53 PM	BCl3 MFC set to  0.000000
12/13/2012	4:47:53 PM	PH3 MFC set to  0.000000
12/13/2012	4:47:53 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:47:53 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:47:53 PM	Tube furnace set to 800
12/13/2012	4:49:53 PM	H2 valve closed
12/13/2012	4:49:53 PM	BCl3 valve closed
12/13/2012	4:49:53 PM	PH3 valve closed
12/13/2012	4:49:53 PM	SiCl4 pre valve closed
12/13/2012	4:49:53 PM	SiCl4 post valve closed
12/13/2012	4:49:53 PM	Main Vac valve closed
12/13/2012	4:49:53 PM	Bypass valve closed
12/13/2012	4:49:53 PM	Helium valve opened
12/13/2012	4:49:53 PM	Bubbler valve opened
12/13/2012	4:49:53 PM	Helium MFC set to  500.000000
12/13/2012	4:49:53 PM	H2 MFC set to  0.000000
12/13/2012	4:49:53 PM	BCl3 MFC set to  0.000000
12/13/2012	4:49:53 PM	PH3 MFC set to  0.000000
12/13/2012	4:49:53 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:49:53 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:49:53 PM	Tube furnace set to 750
12/13/2012	4:51:53 PM	H2 valve closed
12/13/2012	4:51:53 PM	BCl3 valve closed
12/13/2012	4:51:53 PM	PH3 valve closed
12/13/2012	4:51:53 PM	SiCl4 pre valve closed
12/13/2012	4:51:53 PM	SiCl4 post valve closed
12/13/2012	4:51:53 PM	Main Vac valve closed
12/13/2012	4:51:53 PM	Bypass valve closed
12/13/2012	4:51:53 PM	Helium valve opened
12/13/2012	4:51:53 PM	Bubbler valve opened
12/13/2012	4:51:53 PM	Helium MFC set to  500.000000
12/13/2012	4:51:53 PM	H2 MFC set to  0.000000
12/13/2012	4:51:53 PM	BCl3 MFC set to  0.000000
12/13/2012	4:51:53 PM	PH3 MFC set to  0.000000
12/13/2012	4:51:53 PM	SiCl4 MFC set to  0.000000
12/13/2012	4:51:53 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	4:51:54 PM	Tube furnace set to 0
12/13/2012	5:11:53 PM	Helium valve closed
12/13/2012	5:11:53 PM	H2 valve closed
12/13/2012	5:11:53 PM	BCl3 valve closed
12/13/2012	5:11:54 PM	PH3 valve closed
12/13/2012	5:11:54 PM	SiCl4 pre valve closed
12/13/2012	5:11:54 PM	SiCl4 post valve closed
12/13/2012	5:11:54 PM	Main Vac valve closed
12/13/2012	5:11:54 PM	Bypass valve closed
12/13/2012	5:11:54 PM	Bubbler valve closed
12/13/2012	5:11:54 PM	Helium MFC set to  0.000000
12/13/2012	5:11:54 PM	H2 MFC set to  0.000000
12/13/2012	5:11:54 PM	BCl3 MFC set to  0.000000
12/13/2012	5:11:54 PM	PH3 MFC set to  0.000000
12/13/2012	5:11:54 PM	SiCl4 MFC set to  0.000000
12/13/2012	5:11:54 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	5:11:54 PM	Tube furnace set to 0
12/13/2012	5:11:55 PM	Run finished at 5:11 PM
12/13/2012	6:31:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2012	6:31:42 PM	Recipe started at 6:31 PM
12/13/2012	6:31:42 PM	Helium valve closed
12/13/2012	6:31:42 PM	H2 valve closed
12/13/2012	6:31:42 PM	BCl3 valve closed
12/13/2012	6:31:42 PM	PH3 valve closed
12/13/2012	6:31:42 PM	SiCl4 pre valve closed
12/13/2012	6:31:42 PM	SiCl4 post valve closed
12/13/2012	6:31:42 PM	Main Vac valve closed
12/13/2012	6:31:42 PM	Bypass valve closed
12/13/2012	6:31:42 PM	Bubbler valve closed
12/13/2012	6:31:42 PM	Helium MFC set to  0.000000
12/13/2012	6:31:42 PM	H2 MFC set to  0.000000
12/13/2012	6:31:42 PM	BCl3 MFC set to  0.000000
12/13/2012	6:31:42 PM	PH3 MFC set to  0.000000
12/13/2012	6:31:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:31:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:31:42 PM	Tube furnace set to 0
12/13/2012	6:31:45 PM	H2 valve closed
12/13/2012	6:31:45 PM	BCl3 valve closed
12/13/2012	6:31:45 PM	PH3 valve closed
12/13/2012	6:31:45 PM	SiCl4 pre valve closed
12/13/2012	6:31:45 PM	SiCl4 post valve closed
12/13/2012	6:31:45 PM	Main Vac valve closed
12/13/2012	6:31:45 PM	Bypass valve closed
12/13/2012	6:31:45 PM	Bubbler valve closed
12/13/2012	6:31:45 PM	Helium valve opened
12/13/2012	6:31:45 PM	Helium MFC set to  500.000000
12/13/2012	6:31:45 PM	H2 MFC set to  0.000000
12/13/2012	6:31:45 PM	BCl3 MFC set to  0.000000
12/13/2012	6:31:45 PM	PH3 MFC set to  0.000000
12/13/2012	6:31:45 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:31:45 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:31:45 PM	Tube furnace set to 0
12/13/2012	6:31:52 PM	Helium valve closed
12/13/2012	6:31:52 PM	H2 valve closed
12/13/2012	6:31:52 PM	BCl3 valve closed
12/13/2012	6:31:52 PM	PH3 valve closed
12/13/2012	6:31:52 PM	SiCl4 pre valve closed
12/13/2012	6:31:52 PM	SiCl4 post valve closed
12/13/2012	6:31:52 PM	Main Vac valve closed
12/13/2012	6:31:52 PM	Bypass valve closed
12/13/2012	6:31:52 PM	Bubbler valve closed
12/13/2012	6:31:52 PM	Helium MFC set to  0.000000
12/13/2012	6:31:52 PM	H2 MFC set to  0.000000
12/13/2012	6:31:52 PM	BCl3 MFC set to  0.000000
12/13/2012	6:31:52 PM	PH3 MFC set to  0.000000
12/13/2012	6:31:52 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:31:52 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:31:52 PM	Tube furnace set to 0
12/13/2012	6:31:53 PM	Run finished at 6:31 PM
12/13/2012	6:31:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/13/2012	6:34:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2012	6:34:41 PM	Recipe started at 6:34 PM
12/13/2012	6:34:41 PM	Helium valve closed
12/13/2012	6:34:41 PM	H2 valve closed
12/13/2012	6:34:41 PM	BCl3 valve closed
12/13/2012	6:34:41 PM	PH3 valve closed
12/13/2012	6:34:41 PM	SiCl4 pre valve closed
12/13/2012	6:34:41 PM	SiCl4 post valve closed
12/13/2012	6:34:41 PM	Main Vac valve closed
12/13/2012	6:34:41 PM	Bubbler valve closed
12/13/2012	6:34:41 PM	Bypass valve opened
12/13/2012	6:34:41 PM	Helium MFC set to  0.000000
12/13/2012	6:34:41 PM	H2 MFC set to  0.000000
12/13/2012	6:34:41 PM	BCl3 MFC set to  0.000000
12/13/2012	6:34:41 PM	PH3 MFC set to  0.000000
12/13/2012	6:34:41 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:34:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:34:42 PM	Tube furnace set to 0
12/13/2012	6:36:06 PM	Helium valve closed
12/13/2012	6:36:06 PM	H2 valve closed
12/13/2012	6:36:06 PM	BCl3 valve closed
12/13/2012	6:36:06 PM	PH3 valve closed
12/13/2012	6:36:06 PM	SiCl4 pre valve closed
12/13/2012	6:36:06 PM	SiCl4 post valve closed
12/13/2012	6:36:06 PM	Main Vac valve closed
12/13/2012	6:36:06 PM	Bubbler valve closed
12/13/2012	6:36:06 PM	Bypass valve opened
12/13/2012	6:36:06 PM	Helium MFC set to  0.000000
12/13/2012	6:36:06 PM	H2 MFC set to  0.000000
12/13/2012	6:36:06 PM	BCl3 MFC set to  0.000000
12/13/2012	6:36:06 PM	PH3 MFC set to  0.000000
12/13/2012	6:36:06 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:36:06 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:36:06 PM	Tube furnace set to 0
12/13/2012	6:37:06 PM	Helium valve closed
12/13/2012	6:37:06 PM	H2 valve closed
12/13/2012	6:37:06 PM	BCl3 valve closed
12/13/2012	6:37:06 PM	PH3 valve closed
12/13/2012	6:37:06 PM	SiCl4 pre valve closed
12/13/2012	6:37:06 PM	SiCl4 post valve closed
12/13/2012	6:37:06 PM	Bypass valve closed
12/13/2012	6:37:06 PM	Bubbler valve closed
12/13/2012	6:37:06 PM	Main Vac valve opened
12/13/2012	6:37:06 PM	Helium MFC set to  0.000000
12/13/2012	6:37:06 PM	H2 MFC set to  0.000000
12/13/2012	6:37:06 PM	BCl3 MFC set to  0.000000
12/13/2012	6:37:06 PM	PH3 MFC set to  0.000000
12/13/2012	6:37:06 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:37:06 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:37:06 PM	Tube furnace set to 0
12/13/2012	6:37:07 PM	Run finished at 6:37 PM
12/13/2012	6:37:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/13/2012	6:41:40 PM	Recipe started at 6:41 PM
12/13/2012	6:41:40 PM	Helium valve closed
12/13/2012	6:41:40 PM	H2 valve closed
12/13/2012	6:41:40 PM	BCl3 valve closed
12/13/2012	6:41:40 PM	PH3 valve closed
12/13/2012	6:41:40 PM	SiCl4 pre valve closed
12/13/2012	6:41:40 PM	SiCl4 post valve closed
12/13/2012	6:41:40 PM	Bypass valve closed
12/13/2012	6:41:40 PM	Bubbler valve closed
12/13/2012	6:41:40 PM	Main Vac valve opened
12/13/2012	6:41:40 PM	Helium MFC set to  0.000000
12/13/2012	6:41:40 PM	H2 MFC set to  0.000000
12/13/2012	6:41:40 PM	BCl3 MFC set to  0.000000
12/13/2012	6:41:40 PM	PH3 MFC set to  0.000000
12/13/2012	6:41:40 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:41:40 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:41:40 PM	Tube furnace set to 180
12/13/2012	6:42:40 PM	H2 valve closed
12/13/2012	6:42:40 PM	BCl3 valve closed
12/13/2012	6:42:40 PM	PH3 valve closed
12/13/2012	6:42:40 PM	SiCl4 pre valve closed
12/13/2012	6:42:40 PM	SiCl4 post valve closed
12/13/2012	6:42:40 PM	Bypass valve closed
12/13/2012	6:42:40 PM	Bubbler valve closed
12/13/2012	6:42:40 PM	Helium valve opened
12/13/2012	6:42:40 PM	Main Vac valve opened
12/13/2012	6:42:40 PM	Helium MFC set to  10.000000
12/13/2012	6:42:40 PM	H2 MFC set to  0.000000
12/13/2012	6:42:40 PM	BCl3 MFC set to  0.000000
12/13/2012	6:42:40 PM	PH3 MFC set to  0.000000
12/13/2012	6:42:40 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:42:40 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:42:40 PM	Tube furnace set to 180
12/13/2012	6:43:10 PM	Helium valve closed
12/13/2012	6:43:10 PM	H2 valve closed
12/13/2012	6:43:10 PM	BCl3 valve closed
12/13/2012	6:43:10 PM	PH3 valve closed
12/13/2012	6:43:10 PM	SiCl4 pre valve closed
12/13/2012	6:43:10 PM	SiCl4 post valve closed
12/13/2012	6:43:10 PM	Bypass valve closed
12/13/2012	6:43:10 PM	Bubbler valve closed
12/13/2012	6:43:10 PM	Main Vac valve opened
12/13/2012	6:43:10 PM	Helium MFC set to  0.000000
12/13/2012	6:43:10 PM	H2 MFC set to  0.000000
12/13/2012	6:43:10 PM	BCl3 MFC set to  0.000000
12/13/2012	6:43:10 PM	PH3 MFC set to  0.000000
12/13/2012	6:43:10 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:43:10 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:43:10 PM	Tube furnace set to 180
12/13/2012	6:43:40 PM	H2 valve closed
12/13/2012	6:43:40 PM	BCl3 valve closed
12/13/2012	6:43:40 PM	PH3 valve closed
12/13/2012	6:43:40 PM	SiCl4 pre valve closed
12/13/2012	6:43:40 PM	SiCl4 post valve closed
12/13/2012	6:43:40 PM	Bypass valve closed
12/13/2012	6:43:40 PM	Bubbler valve closed
12/13/2012	6:43:40 PM	Helium valve opened
12/13/2012	6:43:40 PM	Main Vac valve opened
12/13/2012	6:43:40 PM	Helium MFC set to  10.000000
12/13/2012	6:43:40 PM	H2 MFC set to  0.000000
12/13/2012	6:43:40 PM	BCl3 MFC set to  0.000000
12/13/2012	6:43:40 PM	PH3 MFC set to  0.000000
12/13/2012	6:43:40 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:43:40 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:43:41 PM	Tube furnace set to 180
12/13/2012	6:44:11 PM	Helium valve closed
12/13/2012	6:44:11 PM	H2 valve closed
12/13/2012	6:44:11 PM	BCl3 valve closed
12/13/2012	6:44:11 PM	PH3 valve closed
12/13/2012	6:44:11 PM	SiCl4 pre valve closed
12/13/2012	6:44:11 PM	SiCl4 post valve closed
12/13/2012	6:44:11 PM	Bypass valve closed
12/13/2012	6:44:11 PM	Bubbler valve closed
12/13/2012	6:44:11 PM	Main Vac valve opened
12/13/2012	6:44:11 PM	Helium MFC set to  0.000000
12/13/2012	6:44:11 PM	H2 MFC set to  0.000000
12/13/2012	6:44:11 PM	BCl3 MFC set to  0.000000
12/13/2012	6:44:11 PM	PH3 MFC set to  0.000000
12/13/2012	6:44:11 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:44:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:44:11 PM	Tube furnace set to 180
12/13/2012	6:44:41 PM	H2 valve closed
12/13/2012	6:44:41 PM	BCl3 valve closed
12/13/2012	6:44:41 PM	PH3 valve closed
12/13/2012	6:44:41 PM	SiCl4 pre valve closed
12/13/2012	6:44:41 PM	SiCl4 post valve closed
12/13/2012	6:44:41 PM	Bypass valve closed
12/13/2012	6:44:41 PM	Bubbler valve closed
12/13/2012	6:44:41 PM	Helium valve opened
12/13/2012	6:44:41 PM	Main Vac valve opened
12/13/2012	6:44:41 PM	Helium MFC set to  10.000000
12/13/2012	6:44:41 PM	H2 MFC set to  0.000000
12/13/2012	6:44:41 PM	BCl3 MFC set to  0.000000
12/13/2012	6:44:41 PM	PH3 MFC set to  0.000000
12/13/2012	6:44:41 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:44:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:44:41 PM	Tube furnace set to 180
12/13/2012	6:45:11 PM	Helium valve closed
12/13/2012	6:45:11 PM	H2 valve closed
12/13/2012	6:45:11 PM	BCl3 valve closed
12/13/2012	6:45:11 PM	PH3 valve closed
12/13/2012	6:45:11 PM	SiCl4 pre valve closed
12/13/2012	6:45:11 PM	SiCl4 post valve closed
12/13/2012	6:45:11 PM	Bypass valve closed
12/13/2012	6:45:11 PM	Bubbler valve closed
12/13/2012	6:45:11 PM	Main Vac valve opened
12/13/2012	6:45:11 PM	Helium MFC set to  0.000000
12/13/2012	6:45:11 PM	H2 MFC set to  0.000000
12/13/2012	6:45:11 PM	BCl3 MFC set to  0.000000
12/13/2012	6:45:11 PM	PH3 MFC set to  0.000000
12/13/2012	6:45:11 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:45:11 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:45:11 PM	Tube furnace set to 180
12/13/2012	6:45:41 PM	H2 valve closed
12/13/2012	6:45:41 PM	BCl3 valve closed
12/13/2012	6:45:41 PM	PH3 valve closed
12/13/2012	6:45:41 PM	SiCl4 pre valve closed
12/13/2012	6:45:41 PM	SiCl4 post valve closed
12/13/2012	6:45:41 PM	Bypass valve closed
12/13/2012	6:45:41 PM	Bubbler valve closed
12/13/2012	6:45:41 PM	Helium valve opened
12/13/2012	6:45:41 PM	Main Vac valve opened
12/13/2012	6:45:41 PM	Helium MFC set to  10.000000
12/13/2012	6:45:41 PM	H2 MFC set to  0.000000
12/13/2012	6:45:41 PM	BCl3 MFC set to  0.000000
12/13/2012	6:45:41 PM	PH3 MFC set to  0.000000
12/13/2012	6:45:41 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:45:41 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:45:42 PM	Tube furnace set to 180
12/13/2012	6:46:12 PM	Helium valve closed
12/13/2012	6:46:12 PM	H2 valve closed
12/13/2012	6:46:12 PM	BCl3 valve closed
12/13/2012	6:46:12 PM	PH3 valve closed
12/13/2012	6:46:12 PM	SiCl4 pre valve closed
12/13/2012	6:46:12 PM	SiCl4 post valve closed
12/13/2012	6:46:12 PM	Bypass valve closed
12/13/2012	6:46:12 PM	Bubbler valve closed
12/13/2012	6:46:12 PM	Main Vac valve opened
12/13/2012	6:46:12 PM	Helium MFC set to  0.000000
12/13/2012	6:46:12 PM	H2 MFC set to  0.000000
12/13/2012	6:46:12 PM	BCl3 MFC set to  0.000000
12/13/2012	6:46:12 PM	PH3 MFC set to  0.000000
12/13/2012	6:46:12 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:46:12 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:46:12 PM	Tube furnace set to 180
12/13/2012	6:46:42 PM	H2 valve closed
12/13/2012	6:46:42 PM	BCl3 valve closed
12/13/2012	6:46:42 PM	PH3 valve closed
12/13/2012	6:46:42 PM	SiCl4 pre valve closed
12/13/2012	6:46:42 PM	SiCl4 post valve closed
12/13/2012	6:46:42 PM	Bypass valve closed
12/13/2012	6:46:42 PM	Bubbler valve closed
12/13/2012	6:46:42 PM	Helium valve opened
12/13/2012	6:46:42 PM	Main Vac valve opened
12/13/2012	6:46:42 PM	Helium MFC set to  10.000000
12/13/2012	6:46:42 PM	H2 MFC set to  0.000000
12/13/2012	6:46:42 PM	BCl3 MFC set to  0.000000
12/13/2012	6:46:42 PM	PH3 MFC set to  0.000000
12/13/2012	6:46:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:46:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:46:42 PM	Tube furnace set to 180
12/13/2012	6:47:12 PM	Helium valve closed
12/13/2012	6:47:12 PM	H2 valve closed
12/13/2012	6:47:12 PM	BCl3 valve closed
12/13/2012	6:47:12 PM	PH3 valve closed
12/13/2012	6:47:12 PM	SiCl4 pre valve closed
12/13/2012	6:47:12 PM	SiCl4 post valve closed
12/13/2012	6:47:12 PM	Bypass valve closed
12/13/2012	6:47:12 PM	Bubbler valve closed
12/13/2012	6:47:12 PM	Main Vac valve opened
12/13/2012	6:47:12 PM	Helium MFC set to  0.000000
12/13/2012	6:47:12 PM	H2 MFC set to  0.000000
12/13/2012	6:47:12 PM	BCl3 MFC set to  0.000000
12/13/2012	6:47:12 PM	PH3 MFC set to  0.000000
12/13/2012	6:47:12 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:47:12 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:47:12 PM	Tube furnace set to 180
12/13/2012	6:47:42 PM	H2 valve closed
12/13/2012	6:47:42 PM	BCl3 valve closed
12/13/2012	6:47:42 PM	PH3 valve closed
12/13/2012	6:47:42 PM	SiCl4 pre valve closed
12/13/2012	6:47:42 PM	SiCl4 post valve closed
12/13/2012	6:47:42 PM	Bypass valve closed
12/13/2012	6:47:42 PM	Bubbler valve closed
12/13/2012	6:47:42 PM	Helium valve opened
12/13/2012	6:47:42 PM	Main Vac valve opened
12/13/2012	6:47:42 PM	Helium MFC set to  10.000000
12/13/2012	6:47:42 PM	H2 MFC set to  0.000000
12/13/2012	6:47:42 PM	BCl3 MFC set to  0.000000
12/13/2012	6:47:42 PM	PH3 MFC set to  0.000000
12/13/2012	6:47:42 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:47:42 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:47:43 PM	Tube furnace set to 180
12/13/2012	6:48:13 PM	Helium valve closed
12/13/2012	6:48:13 PM	H2 valve closed
12/13/2012	6:48:13 PM	BCl3 valve closed
12/13/2012	6:48:13 PM	PH3 valve closed
12/13/2012	6:48:13 PM	SiCl4 pre valve closed
12/13/2012	6:48:13 PM	SiCl4 post valve closed
12/13/2012	6:48:13 PM	Bypass valve closed
12/13/2012	6:48:13 PM	Bubbler valve closed
12/13/2012	6:48:13 PM	Main Vac valve opened
12/13/2012	6:48:13 PM	Helium MFC set to  0.000000
12/13/2012	6:48:13 PM	H2 MFC set to  0.000000
12/13/2012	6:48:13 PM	BCl3 MFC set to  0.000000
12/13/2012	6:48:13 PM	PH3 MFC set to  0.000000
12/13/2012	6:48:13 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:48:13 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:48:13 PM	Tube furnace set to 180
12/13/2012	6:48:43 PM	H2 valve closed
12/13/2012	6:48:43 PM	BCl3 valve closed
12/13/2012	6:48:43 PM	PH3 valve closed
12/13/2012	6:48:43 PM	SiCl4 pre valve closed
12/13/2012	6:48:43 PM	SiCl4 post valve closed
12/13/2012	6:48:43 PM	Bypass valve closed
12/13/2012	6:48:43 PM	Bubbler valve closed
12/13/2012	6:48:43 PM	Helium valve opened
12/13/2012	6:48:43 PM	Main Vac valve opened
12/13/2012	6:48:43 PM	Helium MFC set to  10.000000
12/13/2012	6:48:43 PM	H2 MFC set to  0.000000
12/13/2012	6:48:43 PM	BCl3 MFC set to  0.000000
12/13/2012	6:48:43 PM	PH3 MFC set to  0.000000
12/13/2012	6:48:43 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:48:43 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:48:43 PM	Tube furnace set to 180
12/13/2012	6:49:13 PM	Helium valve closed
12/13/2012	6:49:13 PM	H2 valve closed
12/13/2012	6:49:13 PM	BCl3 valve closed
12/13/2012	6:49:13 PM	PH3 valve closed
12/13/2012	6:49:13 PM	SiCl4 pre valve closed
12/13/2012	6:49:13 PM	SiCl4 post valve closed
12/13/2012	6:49:13 PM	Bypass valve closed
12/13/2012	6:49:13 PM	Bubbler valve closed
12/13/2012	6:49:13 PM	Main Vac valve opened
12/13/2012	6:49:13 PM	Helium MFC set to  0.000000
12/13/2012	6:49:13 PM	H2 MFC set to  0.000000
12/13/2012	6:49:13 PM	BCl3 MFC set to  0.000000
12/13/2012	6:49:13 PM	PH3 MFC set to  0.000000
12/13/2012	6:49:13 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:49:13 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:49:13 PM	Tube furnace set to 180
12/13/2012	6:49:43 PM	H2 valve closed
12/13/2012	6:49:43 PM	BCl3 valve closed
12/13/2012	6:49:43 PM	PH3 valve closed
12/13/2012	6:49:43 PM	SiCl4 pre valve closed
12/13/2012	6:49:43 PM	SiCl4 post valve closed
12/13/2012	6:49:43 PM	Bypass valve closed
12/13/2012	6:49:43 PM	Bubbler valve closed
12/13/2012	6:49:43 PM	Helium valve opened
12/13/2012	6:49:43 PM	Main Vac valve opened
12/13/2012	6:49:43 PM	Helium MFC set to  10.000000
12/13/2012	6:49:43 PM	H2 MFC set to  0.000000
12/13/2012	6:49:43 PM	BCl3 MFC set to  0.000000
12/13/2012	6:49:43 PM	PH3 MFC set to  0.000000
12/13/2012	6:49:43 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:49:43 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:49:44 PM	Tube furnace set to 180
12/13/2012	6:50:14 PM	Helium valve closed
12/13/2012	6:50:14 PM	H2 valve closed
12/13/2012	6:50:14 PM	BCl3 valve closed
12/13/2012	6:50:14 PM	PH3 valve closed
12/13/2012	6:50:14 PM	SiCl4 pre valve closed
12/13/2012	6:50:14 PM	SiCl4 post valve closed
12/13/2012	6:50:14 PM	Bypass valve closed
12/13/2012	6:50:14 PM	Bubbler valve closed
12/13/2012	6:50:14 PM	Main Vac valve opened
12/13/2012	6:50:14 PM	Helium MFC set to  0.000000
12/13/2012	6:50:14 PM	H2 MFC set to  0.000000
12/13/2012	6:50:14 PM	BCl3 MFC set to  0.000000
12/13/2012	6:50:14 PM	PH3 MFC set to  0.000000
12/13/2012	6:50:14 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:50:14 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:50:14 PM	Tube furnace set to 180
12/13/2012	6:50:44 PM	H2 valve closed
12/13/2012	6:50:44 PM	BCl3 valve closed
12/13/2012	6:50:44 PM	PH3 valve closed
12/13/2012	6:50:44 PM	SiCl4 pre valve closed
12/13/2012	6:50:44 PM	SiCl4 post valve closed
12/13/2012	6:50:44 PM	Bypass valve closed
12/13/2012	6:50:44 PM	Bubbler valve closed
12/13/2012	6:50:44 PM	Helium valve opened
12/13/2012	6:50:44 PM	Main Vac valve opened
12/13/2012	6:50:44 PM	Helium MFC set to  10.000000
12/13/2012	6:50:44 PM	H2 MFC set to  0.000000
12/13/2012	6:50:44 PM	BCl3 MFC set to  0.000000
12/13/2012	6:50:44 PM	PH3 MFC set to  0.000000
12/13/2012	6:50:44 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:50:44 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:50:44 PM	Tube furnace set to 180
12/13/2012	6:51:14 PM	Helium valve closed
12/13/2012	6:51:14 PM	H2 valve closed
12/13/2012	6:51:14 PM	BCl3 valve closed
12/13/2012	6:51:14 PM	PH3 valve closed
12/13/2012	6:51:14 PM	SiCl4 pre valve closed
12/13/2012	6:51:14 PM	SiCl4 post valve closed
12/13/2012	6:51:14 PM	Bypass valve closed
12/13/2012	6:51:14 PM	Bubbler valve closed
12/13/2012	6:51:14 PM	Main Vac valve opened
12/13/2012	6:51:14 PM	Helium MFC set to  0.000000
12/13/2012	6:51:14 PM	H2 MFC set to  0.000000
12/13/2012	6:51:14 PM	BCl3 MFC set to  0.000000
12/13/2012	6:51:14 PM	PH3 MFC set to  0.000000
12/13/2012	6:51:14 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:51:14 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:51:14 PM	Tube furnace set to 180
12/13/2012	6:51:44 PM	H2 valve closed
12/13/2012	6:51:44 PM	BCl3 valve closed
12/13/2012	6:51:44 PM	PH3 valve closed
12/13/2012	6:51:44 PM	SiCl4 pre valve closed
12/13/2012	6:51:44 PM	SiCl4 post valve closed
12/13/2012	6:51:44 PM	Bypass valve closed
12/13/2012	6:51:44 PM	Bubbler valve closed
12/13/2012	6:51:44 PM	Helium valve opened
12/13/2012	6:51:44 PM	Main Vac valve opened
12/13/2012	6:51:44 PM	Helium MFC set to  10.000000
12/13/2012	6:51:44 PM	H2 MFC set to  0.000000
12/13/2012	6:51:44 PM	BCl3 MFC set to  0.000000
12/13/2012	6:51:44 PM	PH3 MFC set to  0.000000
12/13/2012	6:51:44 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:51:44 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:51:45 PM	Tube furnace set to 180
12/13/2012	6:52:15 PM	Helium valve closed
12/13/2012	6:52:15 PM	H2 valve closed
12/13/2012	6:52:15 PM	BCl3 valve closed
12/13/2012	6:52:15 PM	PH3 valve closed
12/13/2012	6:52:15 PM	SiCl4 pre valve closed
12/13/2012	6:52:15 PM	SiCl4 post valve closed
12/13/2012	6:52:15 PM	Bypass valve closed
12/13/2012	6:52:15 PM	Bubbler valve closed
12/13/2012	6:52:15 PM	Main Vac valve opened
12/13/2012	6:52:15 PM	Helium MFC set to  0.000000
12/13/2012	6:52:15 PM	H2 MFC set to  0.000000
12/13/2012	6:52:15 PM	BCl3 MFC set to  0.000000
12/13/2012	6:52:15 PM	PH3 MFC set to  0.000000
12/13/2012	6:52:15 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:52:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:52:15 PM	Tube furnace set to 180
12/13/2012	6:54:15 PM	Helium valve closed
12/13/2012	6:54:15 PM	BCl3 valve closed
12/13/2012	6:54:15 PM	PH3 valve closed
12/13/2012	6:54:15 PM	SiCl4 pre valve closed
12/13/2012	6:54:15 PM	SiCl4 post valve closed
12/13/2012	6:54:15 PM	Main Vac valve closed
12/13/2012	6:54:15 PM	Bypass valve closed
12/13/2012	6:54:15 PM	Bubbler valve closed
12/13/2012	6:54:15 PM	H2 valve opened
12/13/2012	6:54:15 PM	Helium MFC set to  0.000000
12/13/2012	6:54:15 PM	H2 MFC set to  500.000000
12/13/2012	6:54:15 PM	BCl3 MFC set to  0.000000
12/13/2012	6:54:15 PM	PH3 MFC set to  0.000000
12/13/2012	6:54:15 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:54:15 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:54:15 PM	Tube furnace set to 1000
12/13/2012	6:55:27 PM	Helium valve closed
12/13/2012	6:55:27 PM	BCl3 valve closed
12/13/2012	6:55:27 PM	PH3 valve closed
12/13/2012	6:55:27 PM	SiCl4 pre valve closed
12/13/2012	6:55:27 PM	SiCl4 post valve closed
12/13/2012	6:55:27 PM	Main Vac valve closed
12/13/2012	6:55:27 PM	Bypass valve closed
12/13/2012	6:55:27 PM	H2 valve opened
12/13/2012	6:55:27 PM	Bubbler valve opened
12/13/2012	6:55:27 PM	Helium MFC set to  0.000000
12/13/2012	6:55:27 PM	H2 MFC set to  500.000000
12/13/2012	6:55:27 PM	BCl3 MFC set to  0.000000
12/13/2012	6:55:27 PM	PH3 MFC set to  0.000000
12/13/2012	6:55:27 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:55:27 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:55:27 PM	Tube furnace set to 1000
12/13/2012	6:55:28 PM	Helium valve closed
12/13/2012	6:55:28 PM	BCl3 valve closed
12/13/2012	6:55:28 PM	PH3 valve closed
12/13/2012	6:55:28 PM	SiCl4 pre valve closed
12/13/2012	6:55:28 PM	SiCl4 post valve closed
12/13/2012	6:55:28 PM	Main Vac valve closed
12/13/2012	6:55:28 PM	Bypass valve closed
12/13/2012	6:55:28 PM	H2 valve opened
12/13/2012	6:55:28 PM	Bubbler valve opened
12/13/2012	6:55:28 PM	Helium MFC set to  0.000000
12/13/2012	6:55:28 PM	H2 MFC set to  500.000000
12/13/2012	6:55:28 PM	BCl3 MFC set to  0.000000
12/13/2012	6:55:28 PM	PH3 MFC set to  0.000000
12/13/2012	6:55:28 PM	SiCl4 MFC set to  0.000000
12/13/2012	6:55:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	6:55:28 PM	Tube furnace set to 1000
12/13/2012	7:15:28 PM	Helium valve closed
12/13/2012	7:15:28 PM	BCl3 valve closed
12/13/2012	7:15:28 PM	Main Vac valve closed
12/13/2012	7:15:28 PM	Bypass valve closed
12/13/2012	7:15:28 PM	H2 valve opened
12/13/2012	7:15:28 PM	PH3 valve opened
12/13/2012	7:15:28 PM	SiCl4 pre valve opened
12/13/2012	7:15:28 PM	SiCl4 post valve opened
12/13/2012	7:15:28 PM	Bubbler valve opened
12/13/2012	7:15:28 PM	Helium MFC set to  0.000000
12/13/2012	7:15:28 PM	H2 MFC set to  500.000000
12/13/2012	7:15:28 PM	BCl3 MFC set to  0.000000
12/13/2012	7:15:28 PM	PH3 MFC set to  20.000000
12/13/2012	7:15:28 PM	SiCl4 MFC set to  50.000000
12/13/2012	7:15:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:15:28 PM	Tube furnace set to 1000
12/13/2012	7:35:28 PM	Helium valve closed
12/13/2012	7:35:28 PM	BCl3 valve closed
12/13/2012	7:35:28 PM	PH3 valve closed
12/13/2012	7:35:28 PM	SiCl4 pre valve closed
12/13/2012	7:35:28 PM	SiCl4 post valve closed
12/13/2012	7:35:28 PM	Main Vac valve closed
12/13/2012	7:35:28 PM	Bypass valve closed
12/13/2012	7:35:28 PM	H2 valve opened
12/13/2012	7:35:28 PM	Bubbler valve opened
12/13/2012	7:35:28 PM	Helium MFC set to  0.000000
12/13/2012	7:35:28 PM	H2 MFC set to  500.000000
12/13/2012	7:35:28 PM	BCl3 MFC set to  0.000000
12/13/2012	7:35:28 PM	PH3 MFC set to  0.000000
12/13/2012	7:35:28 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:35:28 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:35:29 PM	Tube furnace set to 975
12/13/2012	7:36:59 PM	Helium valve closed
12/13/2012	7:36:59 PM	BCl3 valve closed
12/13/2012	7:36:59 PM	PH3 valve closed
12/13/2012	7:36:59 PM	SiCl4 pre valve closed
12/13/2012	7:36:59 PM	SiCl4 post valve closed
12/13/2012	7:36:59 PM	Main Vac valve closed
12/13/2012	7:36:59 PM	Bypass valve closed
12/13/2012	7:36:59 PM	H2 valve opened
12/13/2012	7:36:59 PM	Bubbler valve opened
12/13/2012	7:36:59 PM	Helium MFC set to  0.000000
12/13/2012	7:36:59 PM	H2 MFC set to  500.000000
12/13/2012	7:36:59 PM	BCl3 MFC set to  0.000000
12/13/2012	7:36:59 PM	PH3 MFC set to  0.000000
12/13/2012	7:36:59 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:36:59 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:36:59 PM	Tube furnace set to 950
12/13/2012	7:38:29 PM	Helium valve closed
12/13/2012	7:38:29 PM	BCl3 valve closed
12/13/2012	7:38:29 PM	PH3 valve closed
12/13/2012	7:38:29 PM	SiCl4 pre valve closed
12/13/2012	7:38:29 PM	SiCl4 post valve closed
12/13/2012	7:38:29 PM	Main Vac valve closed
12/13/2012	7:38:29 PM	Bypass valve closed
12/13/2012	7:38:29 PM	H2 valve opened
12/13/2012	7:38:29 PM	Bubbler valve opened
12/13/2012	7:38:29 PM	Helium MFC set to  0.000000
12/13/2012	7:38:29 PM	H2 MFC set to  500.000000
12/13/2012	7:38:29 PM	BCl3 MFC set to  0.000000
12/13/2012	7:38:29 PM	PH3 MFC set to  0.000000
12/13/2012	7:38:29 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:38:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:38:29 PM	Tube furnace set to 925
12/13/2012	7:39:59 PM	Helium valve closed
12/13/2012	7:39:59 PM	BCl3 valve closed
12/13/2012	7:39:59 PM	PH3 valve closed
12/13/2012	7:39:59 PM	SiCl4 pre valve closed
12/13/2012	7:39:59 PM	SiCl4 post valve closed
12/13/2012	7:39:59 PM	Main Vac valve closed
12/13/2012	7:39:59 PM	Bypass valve closed
12/13/2012	7:39:59 PM	H2 valve opened
12/13/2012	7:39:59 PM	Bubbler valve opened
12/13/2012	7:39:59 PM	Helium MFC set to  0.000000
12/13/2012	7:39:59 PM	H2 MFC set to  500.000000
12/13/2012	7:39:59 PM	BCl3 MFC set to  0.000000
12/13/2012	7:39:59 PM	PH3 MFC set to  0.000000
12/13/2012	7:39:59 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:39:59 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:39:59 PM	Tube furnace set to 900
12/13/2012	7:41:29 PM	H2 valve closed
12/13/2012	7:41:29 PM	BCl3 valve closed
12/13/2012	7:41:29 PM	PH3 valve closed
12/13/2012	7:41:29 PM	SiCl4 pre valve closed
12/13/2012	7:41:29 PM	SiCl4 post valve closed
12/13/2012	7:41:29 PM	Main Vac valve closed
12/13/2012	7:41:29 PM	Bypass valve closed
12/13/2012	7:41:29 PM	Helium valve opened
12/13/2012	7:41:29 PM	Bubbler valve opened
12/13/2012	7:41:29 PM	Helium MFC set to  500.000000
12/13/2012	7:41:29 PM	H2 MFC set to  0.000000
12/13/2012	7:41:29 PM	BCl3 MFC set to  0.000000
12/13/2012	7:41:29 PM	PH3 MFC set to  0.000000
12/13/2012	7:41:29 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:41:29 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:41:30 PM	Tube furnace set to 875
12/13/2012	7:43:00 PM	H2 valve closed
12/13/2012	7:43:00 PM	BCl3 valve closed
12/13/2012	7:43:00 PM	PH3 valve closed
12/13/2012	7:43:00 PM	SiCl4 pre valve closed
12/13/2012	7:43:00 PM	SiCl4 post valve closed
12/13/2012	7:43:00 PM	Main Vac valve closed
12/13/2012	7:43:00 PM	Bypass valve closed
12/13/2012	7:43:00 PM	Helium valve opened
12/13/2012	7:43:00 PM	Bubbler valve opened
12/13/2012	7:43:00 PM	Helium MFC set to  500.000000
12/13/2012	7:43:00 PM	H2 MFC set to  0.000000
12/13/2012	7:43:00 PM	BCl3 MFC set to  0.000000
12/13/2012	7:43:00 PM	PH3 MFC set to  0.000000
12/13/2012	7:43:00 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:43:00 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:43:00 PM	Tube furnace set to 850
12/13/2012	7:44:30 PM	H2 valve closed
12/13/2012	7:44:30 PM	BCl3 valve closed
12/13/2012	7:44:30 PM	PH3 valve closed
12/13/2012	7:44:30 PM	SiCl4 pre valve closed
12/13/2012	7:44:30 PM	SiCl4 post valve closed
12/13/2012	7:44:30 PM	Main Vac valve closed
12/13/2012	7:44:30 PM	Bypass valve closed
12/13/2012	7:44:30 PM	Helium valve opened
12/13/2012	7:44:30 PM	Bubbler valve opened
12/13/2012	7:44:30 PM	Helium MFC set to  500.000000
12/13/2012	7:44:30 PM	H2 MFC set to  0.000000
12/13/2012	7:44:30 PM	BCl3 MFC set to  0.000000
12/13/2012	7:44:30 PM	PH3 MFC set to  0.000000
12/13/2012	7:44:30 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:44:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:44:30 PM	Tube furnace set to 825
12/13/2012	7:46:00 PM	H2 valve closed
12/13/2012	7:46:00 PM	BCl3 valve closed
12/13/2012	7:46:00 PM	PH3 valve closed
12/13/2012	7:46:00 PM	SiCl4 pre valve closed
12/13/2012	7:46:00 PM	SiCl4 post valve closed
12/13/2012	7:46:00 PM	Main Vac valve closed
12/13/2012	7:46:00 PM	Bypass valve closed
12/13/2012	7:46:00 PM	Helium valve opened
12/13/2012	7:46:00 PM	Bubbler valve opened
12/13/2012	7:46:00 PM	Helium MFC set to  500.000000
12/13/2012	7:46:00 PM	H2 MFC set to  0.000000
12/13/2012	7:46:00 PM	BCl3 MFC set to  0.000000
12/13/2012	7:46:00 PM	PH3 MFC set to  0.000000
12/13/2012	7:46:00 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:46:00 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:46:00 PM	Tube furnace set to 800
12/13/2012	7:47:30 PM	H2 valve closed
12/13/2012	7:47:30 PM	BCl3 valve closed
12/13/2012	7:47:30 PM	PH3 valve closed
12/13/2012	7:47:30 PM	SiCl4 pre valve closed
12/13/2012	7:47:30 PM	SiCl4 post valve closed
12/13/2012	7:47:30 PM	Main Vac valve closed
12/13/2012	7:47:30 PM	Bypass valve closed
12/13/2012	7:47:30 PM	Helium valve opened
12/13/2012	7:47:30 PM	Bubbler valve opened
12/13/2012	7:47:30 PM	Helium MFC set to  500.000000
12/13/2012	7:47:30 PM	H2 MFC set to  0.000000
12/13/2012	7:47:30 PM	BCl3 MFC set to  0.000000
12/13/2012	7:47:30 PM	PH3 MFC set to  0.000000
12/13/2012	7:47:30 PM	SiCl4 MFC set to  0.000000
12/13/2012	7:47:30 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	7:47:31 PM	Tube furnace set to 0
12/13/2012	8:02:31 PM	Helium valve closed
12/13/2012	8:02:31 PM	H2 valve closed
12/13/2012	8:02:31 PM	BCl3 valve closed
12/13/2012	8:02:31 PM	PH3 valve closed
12/13/2012	8:02:31 PM	SiCl4 pre valve closed
12/13/2012	8:02:31 PM	SiCl4 post valve closed
12/13/2012	8:02:31 PM	Main Vac valve closed
12/13/2012	8:02:31 PM	Bypass valve closed
12/13/2012	8:02:31 PM	Bubbler valve closed
12/13/2012	8:02:31 PM	Helium MFC set to  0.000000
12/13/2012	8:02:31 PM	H2 MFC set to  0.000000
12/13/2012	8:02:31 PM	BCl3 MFC set to  0.000000
12/13/2012	8:02:31 PM	PH3 MFC set to  0.000000
12/13/2012	8:02:31 PM	SiCl4 MFC set to  0.000000
12/13/2012	8:02:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	8:02:31 PM	Tube furnace set to 0
12/13/2012	9:02:31 PM	H2 valve closed
12/13/2012	9:02:31 PM	BCl3 valve closed
12/13/2012	9:02:31 PM	PH3 valve closed
12/13/2012	9:02:31 PM	SiCl4 pre valve closed
12/13/2012	9:02:31 PM	SiCl4 post valve closed
12/13/2012	9:02:31 PM	Main Vac valve closed
12/13/2012	9:02:31 PM	Bypass valve closed
12/13/2012	9:02:31 PM	Bubbler valve closed
12/13/2012	9:02:31 PM	Helium valve opened
12/13/2012	9:02:31 PM	Helium MFC set to  500.000000
12/13/2012	9:02:31 PM	H2 MFC set to  0.000000
12/13/2012	9:02:31 PM	BCl3 MFC set to  0.000000
12/13/2012	9:02:31 PM	PH3 MFC set to  0.000000
12/13/2012	9:02:31 PM	SiCl4 MFC set to  0.000000
12/13/2012	9:02:31 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:02:31 PM	Tube furnace set to 0
12/13/2012	9:02:37 PM	H2 valve closed
12/13/2012	9:02:37 PM	BCl3 valve closed
12/13/2012	9:02:37 PM	PH3 valve closed
12/13/2012	9:02:37 PM	SiCl4 pre valve closed
12/13/2012	9:02:37 PM	SiCl4 post valve closed
12/13/2012	9:02:37 PM	Main Vac valve closed
12/13/2012	9:02:37 PM	Bypass valve closed
12/13/2012	9:02:37 PM	Helium valve opened
12/13/2012	9:02:37 PM	Bubbler valve opened
12/13/2012	9:02:37 PM	Helium MFC set to  500.000000
12/13/2012	9:02:37 PM	H2 MFC set to  0.000000
12/13/2012	9:02:37 PM	BCl3 MFC set to  0.000000
12/13/2012	9:02:37 PM	PH3 MFC set to  0.000000
12/13/2012	9:02:37 PM	SiCl4 MFC set to  0.000000
12/13/2012	9:02:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:02:37 PM	Tube furnace set to 0
12/13/2012	9:07:37 PM	Helium valve closed
12/13/2012	9:07:37 PM	H2 valve closed
12/13/2012	9:07:37 PM	BCl3 valve closed
12/13/2012	9:07:37 PM	PH3 valve closed
12/13/2012	9:07:37 PM	SiCl4 pre valve closed
12/13/2012	9:07:37 PM	SiCl4 post valve closed
12/13/2012	9:07:37 PM	Main Vac valve closed
12/13/2012	9:07:37 PM	Bypass valve closed
12/13/2012	9:07:37 PM	Bubbler valve closed
12/13/2012	9:07:37 PM	Helium MFC set to  0.000000
12/13/2012	9:07:37 PM	H2 MFC set to  0.000000
12/13/2012	9:07:37 PM	BCl3 MFC set to  0.000000
12/13/2012	9:07:37 PM	PH3 MFC set to  0.000000
12/13/2012	9:07:37 PM	SiCl4 MFC set to  0.000000
12/13/2012	9:07:37 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:07:38 PM	Tube furnace set to 0
12/13/2012	9:07:39 PM	Helium valve closed
12/13/2012	9:07:39 PM	H2 valve closed
12/13/2012	9:07:39 PM	BCl3 valve closed
12/13/2012	9:07:39 PM	PH3 valve closed
12/13/2012	9:07:39 PM	SiCl4 pre valve closed
12/13/2012	9:07:39 PM	SiCl4 post valve closed
12/13/2012	9:07:39 PM	Main Vac valve closed
12/13/2012	9:07:39 PM	Bubbler valve closed
12/13/2012	9:07:39 PM	Bypass valve opened
12/13/2012	9:07:39 PM	Helium MFC set to  0.000000
12/13/2012	9:07:39 PM	H2 MFC set to  0.000000
12/13/2012	9:07:39 PM	BCl3 MFC set to  0.000000
12/13/2012	9:07:39 PM	PH3 MFC set to  0.000000
12/13/2012	9:07:39 PM	SiCl4 MFC set to  0.000000
12/13/2012	9:07:39 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:07:39 PM	Tube furnace set to 0
12/13/2012	9:08:49 PM	Helium valve closed
12/13/2012	9:08:49 PM	H2 valve closed
12/13/2012	9:08:49 PM	BCl3 valve closed
12/13/2012	9:08:49 PM	PH3 valve closed
12/13/2012	9:08:49 PM	SiCl4 pre valve closed
12/13/2012	9:08:49 PM	SiCl4 post valve closed
12/13/2012	9:08:49 PM	Main Vac valve closed
12/13/2012	9:08:49 PM	Bubbler valve closed
12/13/2012	9:08:49 PM	Bypass valve opened
12/13/2012	9:08:49 PM	Helium MFC set to  0.000000
12/13/2012	9:08:49 PM	H2 MFC set to  0.000000
12/13/2012	9:08:49 PM	BCl3 MFC set to  0.000000
12/13/2012	9:08:49 PM	PH3 MFC set to  0.000000
12/13/2012	9:08:49 PM	SiCl4 MFC set to  0.000000
12/13/2012	9:08:49 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:08:49 PM	Tube furnace set to 0
12/13/2012	9:09:49 PM	Helium valve closed
12/13/2012	9:09:49 PM	H2 valve closed
12/13/2012	9:09:49 PM	BCl3 valve closed
12/13/2012	9:09:49 PM	PH3 valve closed
12/13/2012	9:09:49 PM	SiCl4 pre valve closed
12/13/2012	9:09:49 PM	SiCl4 post valve closed
12/13/2012	9:09:49 PM	Bypass valve closed
12/13/2012	9:09:49 PM	Bubbler valve closed
12/13/2012	9:09:49 PM	Main Vac valve opened
12/13/2012	9:09:49 PM	Helium MFC set to  0.000000
12/13/2012	9:09:49 PM	H2 MFC set to  0.000000
12/13/2012	9:09:49 PM	BCl3 MFC set to  0.000000
12/13/2012	9:09:49 PM	PH3 MFC set to  0.000000
12/13/2012	9:09:49 PM	SiCl4 MFC set to  0.000000
12/13/2012	9:09:49 PM	Bypass solenoid MFC set to  0.000000
12/13/2012	9:09:49 PM	Tube furnace set to 0
12/13/2012	11:49:49 PM	Run finished at 11:49 PM
